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Honeycomb optical window deposition shield and method for a plasma processing system

  • US 7,241,397 B2
  • Filed: 03/30/2004
  • Issued: 07/10/2007
  • Est. Priority Date: 03/30/2004
  • Status: Expired due to Fees
First Claim
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1. An optical window deposition shield comprising:

  • a backing plate having a through hole;

    a honeycomb structure comprising plural adjacent corrugated sheets attached together to form a plurality of adjacent cells in spaces between the adjacent corrugated sheets, the cells configured to allow optical viewing through the honeycomb structure, each cell having an aspect ratio of length to diameter sufficient to impede a processing plasma from traveling through the full length of the cell; and

    a coupling device configured to couple the honeycomb structure to the backing plate such that the honeycomb structure is aligned with at least a portion of the through hole in the backing plate.

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