Lithographic apparatus and device manufacturing method utilizing a multiple substrate carrier for flat panel display substrates

• US 7,242,458 B2
• Filed: 03/01/2005
• Issued: 07/10/2007
• Est. Priority Date: 12/23/2004
• Status: Expired due to Fees

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: ASML Netherlands BV (ASML Holding NV)
• Inventors: Munnig Schmidt, Robert-Han
• Primary Examiner(s): NGUYEN, HUNG
• Application Number:
  US11/067,671
• Publication Number:
  US 20060139602A1
• Time in Patent Office: 861 Days
• Field of Search: 355/53, 355 72- 76
• US Class Current: 355/72
• CPC Class Codes: G03F 7/70691 Handling of masks or workpieces
• CPC Class Codes: G03F 7/70733 Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
• CPC Class Codes: G03F 7/70791 Large workpieces, e.g. glass substrates for flat panel displays or solar panels

Abstract

A system and method allow for more than one substrate to be simultaneously moved and/or positioned on a support table. In one example, this is accomplished through use of a frame that either supports or separates one or more substrates for either transport or positioning on a support table. In another example, this is accomplished through use of spacers on a support table, which are used to properly position one or more substrates. In yet another example, this is accomplished through use of a robot placing one or more substrates on the support table.

Claims

1. A lithographic apparatus, comprising:

an illumination system, wherein the illumination system is arranged to generate a beam of radiation;

a patterning system, wherein the patterning system is arranged to pattern the beam;

a substrate table, wherein the substrate table is arranged to simultaneously hold a plurality of substrates;

a projection system, wherein the projection system is arranged to project the patterned beam onto a target portion of a corresponding one of the plurality of substrates;

a substrate handler, wherein the substrate handler is arranged to move each of the plurality of substrates relative to the substrate table and is arranged to singly or simultaneously carry the plurality of substrates; and

separation devices associated with the substrate table, wherein the separation devices are moveable to form various sized sections to at least one of hold or position various sized ones of the plurality of substrates.

2. The apparatus of claim 1, wherein the substrate handler carries at least two of the plurality of substrates simultaneously.

3. The apparatus of claim 1, wherein the substrate handler comprises:

at least one support surface or platform, the at least one support surface or platform arranged to simultaneously carry the plurality of substrates to and from the substrate table.

4. The apparatus of claim 3, wherein the at least one support surface comprises:

substrate transfer means that moves the substrate on or off the support surface.

5. The apparatus of claim 1, wherein the separation devices comprise:

a frame positioned on the substrate table, the frame including two or more of the sections, wherein the two or more sections are arranged to at least one of hold or position at least two of the plurality of substrates.

6. The apparatus of claim 1, wherein the separation devices include one or more recesses, walls, or spacers.

7. The apparatus of claim 6, wherein the one or more recesses, walls, or spacers are movable to allow for resizing for the various sized ones of the plurality of substrates.

8. The apparatus of claim 6, wherein the one or more walls or spacers are retractable.

9. The apparatus of claim 1, further comprising:

a robot, wherein the robot is arranged to position the plurality of substrates on the substrate handler and move the plurality of substrates from the substrate handler to the substrate table.

10. The apparatus of claim 1, wherein the separation devices comprise:

a frame including the sections, wherein the sections are arranged to securely hold each of the plurality of substrates.

11. The apparatus of claim 10, wherein:

the frame is positioned on the substrate handler; and

a robot positions each of the plurality of substrates in the sections of the frame; and

the substrate handler moves the frame onto the substrate table.

12. The apparatus of claim 10, wherein:

the frame is loaded with the plurality of substrates at a loading location and a robot moves the frame onto the substrate handler; and

the substrate handler moves the frame onto the substrate table.

13. A method, comprising:

patterning a beam of radiation;

projecting the patterned beam onto a target portion of each of a plurality of substrates simultaneously supported on a same support table;

moving separation devices associated with the support table to form sections of various sizes corresponding to various sized ones of the plurality of substrates;

holding or positioning the plurality of substrates with the separation devices; and

singly or simultaneously moving each of the plurality of substrates between a handling device and the support table.

14. The method of claim 13, further comprising using a frame having a plurality of the sections that is positioned on the substrate table as the separation devices, the frame securely holding the plurality of substrates.

15. The method of claim 14, wherein the frame is moved with the plurality of substrates between the handler and the support table.

16. The method of claim 14, wherein:

the frame is loaded with the plurality of substrates;

the frame is positioned on the handling device; and

the frame is moved between the handling device and the substrate table.

17. The method of claim 14 further comprising:

integrating the frame having the plurality of sections into the support table to securely hold the plurality of substrates.

18. The method of claim 13, further comprising:

using a moving device to move the plurality of substrates onto the handler; and

using the moving device to move the plurality of substrates between the handler and the support table.

19. The method of claim 13, further comprising:

using one of spacers, recesses, or spaces on the support table as the separation devices to separate the plurality of substrates.

20. The method of claim 19, further comprising:

allowing the one or more spacers or recesses to be one of moveable or retractable, such that the various sized ones of the plurality of substrates are simultaneously held.