Optical circuit in which fabrication is easy
First Claim
Patent Images
1. A mirror comprising a multi-layer thin film, wherein said multi-layer thin film comprises a first layer and a second layer,said first layer has a reflection surface plane,said second layer has a contact plane with a substrate,an angle between said reflection surface plane and said contact plane is 45°
- or equal to an angle between (100) plane orientation and a (111) plane orientation in a silicon crystal, andsaid mirror has an interior concave portion adjacent to the reflection surface plane which is filled with a non-atmospheric material,wherein said non-atmospheric material is one of a resin composition containing an active energy line polymerization initiator and an active energy line reaction resin.
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Abstract
In a method for fabricating an optical circuit, a mirror element with a protection film formed within a die of a semiconductor is connected to a substrate at a predetermined position. The mirror element with the protection film connected to the substrate is peeled from the die of the semiconductor. The protection film is removed to expose a reflection surface of a reflection film of the mirror element.
34 Citations
10 Claims
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1. A mirror comprising a multi-layer thin film, wherein said multi-layer thin film comprises a first layer and a second layer,
said first layer has a reflection surface plane, said second layer has a contact plane with a substrate, an angle between said reflection surface plane and said contact plane is 45° - or equal to an angle between (100) plane orientation and a (111) plane orientation in a silicon crystal, and
said mirror has an interior concave portion adjacent to the reflection surface plane which is filled with a non-atmospheric material, wherein said non-atmospheric material is one of a resin composition containing an active energy line polymerization initiator and an active energy line reaction resin. - View Dependent Claims (2)
- or equal to an angle between (100) plane orientation and a (111) plane orientation in a silicon crystal, and
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3. A mirror comprising a gold layer, wherein said gold layer has a reflection surface plane and a contact plane,
an angle between said reflection surface plane and said contact plane is 45° - or equal to an angle between (100) plane orientation and a (111) plane orientation in a silicon crystal, and
said mirror has an interior concave portion adjacent to the reflection surface plane which is filled with a non-atmospheric material, wherein said non-atmospheric material is one of a resin composition containing an active energy line polymerization initiator and an active energy line reaction resin. - View Dependent Claims (4)
- or equal to an angle between (100) plane orientation and a (111) plane orientation in a silicon crystal, and
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5. An optical circuit comprising:
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a substrate; an optical fiber or an optical waveguide provided for said substrate; a photodiode or a surface emission type laser provided for said substrate; a mirror connected with said substrate; at least a cantilever of said substrate, wherein said mirror is installed in a tip portion of said at least a cantilever; and an expanding and contracting member which moves said tip portion upwardly and downwardly, wherein said mirror comprises a multi-layer thin film, which comprises a first layer and a second layer, said first layer is a reflection surface plane, said second layer has a contact plane with a substrate, an angle between said reflection surface plane and said contact plane is 45°
or equal to an angle between (100) plane orientation and a (111) plane orientation in a silicon crystal andsaid mirror has an interior concave portion adjacent to the reflection surface plane which is filled with a non-atmospheric material. - View Dependent Claims (6)
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7. An optical circuit comprising:
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a substrate; an optical fiber or an optical waveguide provided for said substrate; a photodiode or a surface emission type laser provided for said substrate; and a mirror connected with said substrate, wherein said mirror comprises a multi-layer thin film, which comprises a first layer and a second layer, said first layer is a reflection surface plane, said second layer has a contact plane with a substrate, an angle between said reflection surface plane and said contact plane is 45°
or equal to an angle between (100) plane orientation and a (111) plane orientation in a silicon crystal, andsaid mirror has an interior concave portion adjacent to the reflection surface plane which is filled with a non-atmospheric material, wherein said non-atmospheric material is one of a resin composition containing an active energy line polymerization initiator and an active energy line reaction resin. - View Dependent Claims (8)
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9. An optical circuit comprising:
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a substrate; an optical fiber or an optical waveguide provided for said substrate; a photodiode or a surface emission type laser provided for said substrate; and a mirror jointed with said substrate, wherein said mirror comprises a gold layer, which comprises a reflection surface plane and a contact plane, an angle between said reflection surface plane and said contact plane is 45°
or equal to an angle between (100) plane orientation and a (111) plane orientation in a silicon crystal andsaid mirror has an interior concave portion adjacent to the reflection surface plane which is filled with a non-atmospheric material, wherein said non-atmospheric material is one of a resin composition containing an active energy line polymerization initiator and an active energy line reaction resin. - View Dependent Claims (10)
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Specification