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Method and apparatus for high resolution coherent optical imaging

  • US 7,242,833 B2
  • Filed: 07/10/2001
  • Issued: 07/10/2007
  • Est. Priority Date: 07/10/2000
  • Status: Expired due to Term
First Claim
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1. An apparatus for optical examination of a sample, the apparatus comprising:

  • an optical source means for providing a plurality of separate optical radiation sources;

    a first optical path extending from the optical source means;

    a focusing means in the first optical path for focusing optical radiation from the optical radiation sources into a plurality of respective focal points located on a surface within the first optical path to provide substantially continuous coverage of a selected portion of the first optical path, wherein, in use, a sample can be located at least partially within said selected portion, thereby permitting simultaneous scanning of a plurality of points within the sample,wherein the optical source means comprises optical coupling means having one of a plurality of optical fibers and a plurality of optical waveguide wafers, wherein ends of the plurality of optical fibers or the plurality of optical waveguide wafers are stepped relative to one another along the first optical path and wherein optical radiation from each optical fiber or each optical waveguide wafer is focused to a different focal point on the surface of the first optical path.

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