Method and apparatus for high resolution coherent optical imaging
First Claim
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1. An apparatus for optical examination of a sample, the apparatus comprising:
- an optical source means for providing a plurality of separate optical radiation sources;
a first optical path extending from the optical source means;
a focusing means in the first optical path for focusing optical radiation from the optical radiation sources into a plurality of respective focal points located on a surface within the first optical path to provide substantially continuous coverage of a selected portion of the first optical path, wherein, in use, a sample can be located at least partially within said selected portion, thereby permitting simultaneous scanning of a plurality of points within the sample,wherein the optical source means comprises optical coupling means having one of a plurality of optical fibers and a plurality of optical waveguide wafers, wherein ends of the plurality of optical fibers or the plurality of optical waveguide wafers are stepped relative to one another along the first optical path and wherein optical radiation from each optical fiber or each optical waveguide wafer is focused to a different focal point on the surface of the first optical path.
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Abstract
A method and an apparatus for examining the subsurface microstructure of a sample are provided. Radiation from a plurality of optical radiation sources travels along a first optical path. In the first optical path, a device focuses the optical radiati n from each of the optical sources into a plurality of respective focal points along the first optical path to provide substantially continuous coverage of a selected portion of the first optical path. Then, a sample on the first optical path within the selected length extending into the sample is scanned along said selected portion of the first optical path.
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27 Claims
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1. An apparatus for optical examination of a sample, the apparatus comprising:
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an optical source means for providing a plurality of separate optical radiation sources; a first optical path extending from the optical source means; a focusing means in the first optical path for focusing optical radiation from the optical radiation sources into a plurality of respective focal points located on a surface within the first optical path to provide substantially continuous coverage of a selected portion of the first optical path, wherein, in use, a sample can be located at least partially within said selected portion, thereby permitting simultaneous scanning of a plurality of points within the sample, wherein the optical source means comprises optical coupling means having one of a plurality of optical fibers and a plurality of optical waveguide wafers, wherein ends of the plurality of optical fibers or the plurality of optical waveguide wafers are stepped relative to one another along the first optical path and wherein optical radiation from each optical fiber or each optical waveguide wafer is focused to a different focal point on the surface of the first optical path. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A method for optical examination of a sample, the method comprising:
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(a) providing radiation from a plurality of separate optical radiation sources, along a first optical path; (b) providing focusing means in the first optical path; (c) focusing the optical radiation from the optical sources into a plurality of respective focal points along a surface within the first optical path to provide substantially continuous coverage of a selected portion of the first optical path; (d) providing a sample located at least partially within the first optical path; (e) simultaneously scanning a plurality of points within the sample, and (f) providing an optical coupling means for the plurality of separate optical radiation sources wherein the optical coupling means have one of a plurality of optical fibers or a plurality of optical waveguide wafers, wherein the method further comprises stepping the ends of the plurality of optical fibers or the plurality of optical waveguide wafers relative to one another in a common plane along the first optical path for focusing optical radiation from each optical fiber or each optical waveguide wafer through a common lens to a different focal point on the surface of the first optical path. - View Dependent Claims (19, 20, 21, 22, 23, 24, 25, 26, 27)
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Specification