MEMS SAW sensor

• US 7,243,547 B2
• Filed: 10/13/2004
• Issued: 07/17/2007
• Est. Priority Date: 10/13/2004
• Status: Active Grant

• Current Assignee: Honeywell International Inc.
• Original Assignee: Honeywell International Inc.
• Inventors: Cobianu, Cornel P., Pavelescu, Ioan, Cook, James D.
• Primary Examiner(s): Williams; Hezron
• Assistant Examiner(s): MILLER, ROSE MARY
• Application Number:
  US10/964,519
• Publication Number:
  US 20060075820A1
• Time in Patent Office: 1,007 Days
• Field of Search: 735/79, 737/02, 310/313.R, 310/313.B, 310/313.D
• US Class Current: 73/579
• CPC Class Codes: G01L 9/0025 with acoustic surface waves

Abstract

Devices and methods for acoustically measuring temperature and pressure are disclosed. An illustrative SAW sensor can include an electrode structure that transmits and receives surface acoustic waves along a SAW delay line, a temperature sensor for measuring temperature along a first direction of the SAW delay line, and a pressure sensor for measuring pressure along a second direction of the SAW delay line. The SAW sensor can include an antenna that wirelessly transmits and receives RF signals to and from an electrical interrogator unit that can be used to power the SAW sensor.

Claims

1. A SAW sensor for sensing temperature and pressure within an environment, comprising:

an electrode structure that transmits and receives surface acoustic waves along a SAW delay line of the sensor;

temperature sensing means for sensing temperature within the environment, said temperature sensing means structured to reflect surface acoustic waves transmitted along a first direction of the SAW delay line; and

pressure sensing means for sensing pressure within the environment, said pressure sensing means structured to reflect surface acoustic waves transmitted along a second direction of the SAW delay line;

wherein the first and second directions are relative to the same SAW delay line.

2. The SAW sensor of claim 1, wherein said electrode structure includes at least one interdigital transducer.

3. The SAW sensor of claim 2, wherein each of said at least one interdigital transducer is coupled to the top surface of a piezoelectric substrate.

4. The SAW sensor of claim 2, wherein said at least one interdigital transducer comprises a single interdigital transducer.

5. The SAW sensor of claim 4, wherein the single interdigital transducer includes a plurality of linear electrodes that transmit and receive surface acoustic waves bidirectionally along the SAW delay line.

6. The SAW sensor of claim 5, wherein said temperature sensing means includes one or more temperature sensing reflectors.

7. The SAW sensor of claim 6, wherein each of the one or more temperature sensing reflectors are oriented lengthwise in a direction orthogonal to the SAW delay line.

8. The SAW sensor of claim 6, wherein each of the one or more temperature sensing reflectors are oriented lengthwise at an angle to the SAW delay line.

9. The SAW sensor of claim 6, wherein said one or more temperature sensing reflectors comprise three temperature sensing reflectors.

10. The SAW sensor of claim 6, wherein said one or more temperature sensing reflectors comprises a single temperature sensing reflector.

11. The SAW sensor of claim 6, wherein said one or more temperature sensing reflectors comprises a single temperature sensing reflector having a first portion oriented in a direction orthogonal to the SAW delay line, and a second portion oriented at an angle relative to the first portion.

12. The SAW sensor of claim 11, wherein said first portion of the single temperature sensing reflector is physically separated from said second portion.

13. The SAW sensor of claim 4, wherein the single interdigital transducer includes a plurality of non-linear electrodes adapted to transmit and receive surface acoustic waves in a first direction parallel to the SAW delay line, and in a second direction oriented at an angle relative to the first direction.

14. The SAW sensor of claim 13, wherein said temperature sensing means includes a first number of temperature sensing reflectors oriented lengthwise in a direction orthogonal to first direction, and a second number of temperature sensing reflectors oriented lengthwise in a direction orthogonal to the second direction.

15. The SAW sensor of claim 2, wherein said at least one interdigital transducer includes a first interdigital transducer adapted to transmit and receive surface acoustic waves along a first SAW delay line, and a second interdigital transducer adapted to transmit and receive surface acoustic waves along a second SAW delay line oriented at an angle to the first SAW delay line.

16. The SAW sensor of claim 1, wherein said temperature sensing means includes one or more temperature reference reflectors in acoustic communication with the SAW delay line.

17. The SAW sensor of claim 1, wherein said pressure sensing means includes a diaphragm having a compressive zone and a stretched zone.

18. The SAW sensor of claim 17, further including one or more pressure sensing reflectors disposed on the compressive zone of the diaphragm.

19. The SAW sensor of claim 18, wherein said one or more pressure sensing reflectors comprises three pressure sensing reflectors.

20. The SAW sensor of claim 18, wherein said one or more pressure sensing reflectors comprises a single pressure sensing reflector.

21. The SAW sensor of claim 1, wherein said pressure sensing means includes one or more reference pressure reflectors in acoustic communication with the SAW delay line.

22. The SAW sensor of claim 21, wherein said one or more reference pressure reflectors comprises a single temperature reference reflector of said temperature sensing means.

23. The SAW sensor of claim 1, further including an absorbing layer or substance positioned adjacent to the electrode structure.

24. The SAW sensor of claim 1, further including tagging means for uniquely identifying the SAW sensor.

25. The SAW sensor of claim 24, wherein said tagging means for uniquely identifying the SAW sensor includes one or more identification reflectors in acoustic communication with the SAW delay line.

26. The SAW sensor of claim 1, further including an electrical interrogator unit for transmitting and receiving RF signals to and from the SAW sensor.

27. The SAW sensor of claim 1, wherein the SAW sensor is passive.

28. The SAW sensor of claim 1, where the SAW sensor is wireless.

29. A SAW sensor for sensing temperature and pressure within an environment, comprising:

a piezoelectric substrate having a top surface;

an interdigital transducer coupled to the top surface of the substrate, said interdigital transducer structured to transmit and receive surface acoustic waves along a SAW delay line of the sensor;

one or more temperature sensing reflectors structured to reflect surface acoustic waves transmitted along a first direction of the SAW delay line;

a diaphragm having a compressive zone and a stretched zone; and

one or more pressure sensing reflectors disposed on the compressive zone of the diaphragm and adapted to reflect surface acoustic waves transmitted along a second direction of the SAW delay line.

30. The SAW sensor of claim 29, wherein the interdigital transducer comprises a single interdigital transducer.

31. The SAW sensor of claim 30, wherein the single interdigital transducer includes a plurality of linear electrodes that transmit and receive surface acoustic waves bidirectionally along the SAW delay line.

32. The SAW sensor of claim 30, wherein each of the one or more temperature sensing reflectors are oriented lengthwise in a direction orthogonal to the SAW delay line.

33. The SAW sensor of claim 30, wherein each of the one or more temperature sensing reflectors are oriented lengthwise at an angle to the SAW delay line.

34. The SAW sensor of claim 30, wherein said one or more temperature sensing reflectors comprises three temperature sensing reflectors.

35. The SAW sensor of claim 30, wherein said one or more temperature sensing reflectors comprises a single temperature sensing reflector having a first portion oriented orthogonally to the SAW delay line, and a second portion oriented at an angle relative to the first portion.

36. The SAW sensor of claim 35, wherein said first portion of the single temperature sensing reflector is physically separated from said second portion.

37. The SAW sensor of claim 30, wherein the single interdigital transducer includes a plurality of non-linear electrodes that transmit and receive surface acoustic waves in a first direction parallel to the SAW delay line, and in a second direction oriented at an angle relative to the first direction.

38. The SAW sensor of claim 37, wherein said one or more temperature sensing reflectors includes a first number of temperature sensing reflectors oriented lengthwise in a direction orthogonal to the first direction, and a second number of temperature sensing reflectors oriented lengthwise in a direction orthogonal to the second direction.

39. The SAW sensor of claim 29, wherein said at least one interdigital transducer includes a first interdigital transducer that transmits and receives surface acoustic waves along a first SAW delay line, and a second interdigital transducer that transmits and receives surface acoustic waves along a second SAW delay line oriented at an angle from the first SAW delay line.

40. The SAW sensor of claim 29, further including one or more temperature reference reflectors in acoustic communication with the SAW delay line.

41. The SAW sensor of claim 29, wherein said one or more pressure sensing reflectors comprises three pressure sensing reflectors.

42. The SAW sensor of claim 29, wherein said one or more pressure sensing reflectors comprises a single pressure sensing reflector.

43. The SAW sensor of claim 29, further including one or more pressure reference reflectors in acoustic communication with the SAW delay line.

44. The SAW sensor of claim 29, further comprising a single reference reflector that provides a referenced phase response for both temperature and pressure measurement of the SAW sensor.

45. The SAW sensor of claim 29, further including an absorbing layer or substance positioned adjacent the interdigital transducer.

46. The SAW sensor of claim 29, further including tagging means for uniquely identifying the SAW sensor.

47. The SAW sensor of claim 46, wherein said tagging means for uniquely identifying the SAW sensor includes one or more identification reflectors in acoustic communication with the SAW delay line.

48. The SAW sensor of claim 29, further including an electrical interrogator unit for transmitting and receiving RF signals to and from the SAW sensor.

49. The SAW sensor of claim 29, wherein the SAW sensor is passive.

50. The SAW sensor of claim 29, where the SAW sensor is wireless.

51. A SAW sensor for sensing temperature and pressure within an environment, comprising:

an electrode structure that transmits and receives surface acoustic waves along a SAW delay line of the sensor;

a single temperature sensing reflector that reflects surface acoustic waves transmitted along a first direction of the SAW delay line;

a diaphragm having a compressive zone and a stretched zone;

a single pressure sensing reflector disposed on the compressive zone of the diaphragm and that reflects surface acoustic waves transmitted along a second direction of the SAW delay line; and

a single reference reflector that provides a referenced phase response for both temperature and pressure measurement of the SAW sensor.

52. A SAW sensor for sensing temperature and pressure within an environment, comprising:

an interdigital transducer that transmits and receives surface acoustic waves along a SAW delay line of the sensor;

temperature sensing means for sensing temperature within the environment, said temperature sensing means structured to reflect surface acoustic waves transmitted along a first direction of the SAW delay line;

pressure sensing means for sensing pressure within the environment, said pressure sensing means structured to reflect surface acoustic waves transmitted along a second direction of the SAW delay line;

wherein the first and second directions are relative to the same SAW delay line;

means for wirelessly receiving a power signal to power the SAW sensor; and

means for wirelessly transmitting an RF response signal from the SAW sensor.

53. A sensor system for acoustically sensing temperature and pressure within an environment, comprising:

a SAW sensor including an electrode structure that transmits and receives surface acoustic waves along a SAW delay line, said SAW sensor including temperature sensing means for measuring temperature along a first direction of the SAW delay line and pressure sensing means for measuring pressure along a second direction of the SAW delay line;

wherein the first and second directions are relative to the same SAW delay line;

means for wirelessly providing power to the SAW sensor; and

means for wirelessly transmitting an RF response signal from the SAW sensor.

54. The sensor system of claim 53, wherein said means for wirelessly providing power to the SAW sensor includes an electrical interrogator unit.

55. The sensor system of claim 53, wherein said means for wirelessly transmitting an RF response signal from the SAW sensor includes an antenna.

56. A method of wirelessly and passively measuring temperature and pressure within an environment, comprising the steps of:

providing a SAW sensor including an electrode structure that transmits and receives surface acoustic waves along a SAW delay line having a +x direction and a −

x direction;

wirelessly powering the electrode structure and transmitting incident surface acoustic waves in both the +x direction and −

x direction of the SAW delay line;

providing one or more temperature sensing reflectors in acoustic communication with the +x direction of the SAW delay line, said one or more temperature reflectors structured to reflect echo signals back to the electrode structure;

providing a diaphragm and one or more pressure sensing reflectors in acoustic communication with the −

x direction of the SAW delay line, said one or more pressure sensing reflectors structured to reflect echo signals back to the electrode structure;

outputting a wireless RF response signal; and

analyzing the RF response signal to obtain a measure of the temperature and pressure within the environment.

57. The method of claim 56, wherein said step wirelessly powering the electrode structure is accomplished with an electrical interrogator unit.

58. The method of claim 56, wherein said step of outputting a wireless RF response signal is accomplished with an antenna operatively coupled to the SAW sensor.

59. The method of claim 56, wherein said step of analyzing the RF response signal outputted by the SAW sensor to obtain a measure of temperature and pressure is accomplished with a controller or processor.