Relative pressure sensor having an atmosphere-side damper
First Claim
1. A relative pressure sensor for measuring a pressure difference between a process pressure and an ambient pressure, comprising a measuring unit, having:
- a first chamber, which is sealed by a first separating membrane and filled with a transmission medium, said first separating membrane being loadable with the process pressure;
a second chamber, which is sealed by a second separating membrane and filled with a transmission medium, said second separating membrane being loadable with the ambient pressure;
a pressure-sensitive element, which separates said first chamber from said second chamber; and
a damper arranged only between said pressure-sensitive element and said second separating membrane, wherein;
said damper protects said pressure-sensitive element against the effect of excess-pressure pulses acting on said first separating membrane.
1 Assignment
0 Petitions
Accused Products
Abstract
A relative pressure sensor comprises two chambers and two separating membranes respectively provided for a process pressure and an ambient pressure. The chambers are separated by a pressure-sensitive element and are filled with a transmission medium. In order to attenuate process-side overload pulses, which act upon the first separating membrane, a hydraulic damper is provided that is placed on the side of the atmosphere between the second separating membrane and the pressure-sensitive element. The pressure-sensitive element is a piezoresistive silicon chip, the transmission medium consists of silicone oil, and the damper is comprised of a filter element made of sintered bronze having 29% porosity and an 11 micrometer pore diameter. The filter element has a length of 8 mm and a diameter of 2 mm.
-
Citations
9 Claims
-
1. A relative pressure sensor for measuring a pressure difference between a process pressure and an ambient pressure, comprising a measuring unit, having:
-
a first chamber, which is sealed by a first separating membrane and filled with a transmission medium, said first separating membrane being loadable with the process pressure; a second chamber, which is sealed by a second separating membrane and filled with a transmission medium, said second separating membrane being loadable with the ambient pressure; a pressure-sensitive element, which separates said first chamber from said second chamber; and a damper arranged only between said pressure-sensitive element and said second separating membrane, wherein; said damper protects said pressure-sensitive element against the effect of excess-pressure pulses acting on said first separating membrane. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
-
Specification