Determining the health of a desired node in a multi-level system

• US 7,246,290 B1
• Filed: 10/31/2002
• Issued: 07/17/2007
• Est. Priority Date: 10/31/2002
• Status: Expired due to Fees

• Current Assignee: GlobalFoundries, Inc.
• Original Assignee: Advanced Micro Devices, Inc.
• Inventors: Green, Eric O., Cusson, Brian K.
• Primary Examiner(s): Lamarre; Guy
• Assistant Examiner(s): Alphonse; Fritz
• Application Number:
  US10/284,640
• Time in Patent Office: 1,720 Days
• Field of Search: 714/737, 714/738, 714/48, 714/2, 714/33, 714/726, 714/42, 714/25, 716/4, 324/765
• US Class Current: 714/737
• CPC Class Codes: G05B 23/0243 model based detection method, e.g. first-principles knowledge model

Abstract

A method and apparatus are provided for determining the health of a desired node in a multi-level system. The method includes defining a first fault model associated with a first node of a first level of the system, defining a second fault model associated with a second node of a second level of the system, and defining a third fault model associated with a third node associated with a third level of the system. The method further includes determining a health value associated with at least one of the first node, the second node, and the third node of the system based on at least one of the first fault model, second fault model, and the third fault model.

Claims

1. A method, comprising:

defining a first fault model associated with a first node of a first level of a manufacturing system;

defining a second fault model associated with a second node of a second level of the system;

defining a third fault model associated with a third node associated with a third level of the system, where the second and third levels are lower than the first level;

processing workpieces in the manufacturing system;

receiving operational data associated with the processing of the workpieces;

and

determining a health value associated with the first node based on applying at least a portion of the operational data to the second fault model and applying at least a portion of the operational data to the third fault model.

2. The method of claim 1, wherein determining the health value comprises determining the health value associated with the first node of a semiconductor manufacturing system.

3. The method of claim 1, wherein defining the third fault model comprises defining the third fault model for the semiconductor manufacturing system.

4. The method of claim 1, wherein determining the health value associated with the first node comprises combining a health value associated with the second node and a health value associated with the third node.

5. The method of claim 4, further comprising determining if the health value is less than a preselected threshold value, wherein the threshold value is indicative of an acceptable level of performance.

6. The method of claim 5, further comprising determining a possible cause of a fault in response to determining that the health value is less than the preselected threshold value.

7. The method of claim 1, wherein determining the health value comprises determining the health value associated with at least one of a factory node, a fab module node, and a processing tool node.

8. The method of claim 7, further including defining a fourth fault model associated with a second fab module node and determining a health value associated with the second fab module, and wherein determining the health value associated with the factory node comprises combining at least two of the health values associated with the fab modules.

9. An apparatus, comprising:

a storage unit adapted to store;

a first fault model associated with a first node of a first level of a manufacturing system;

a second fault model associated with a second node of a second level of the system; and

a third fault model associated with a third node associated with a third level of the system; and

a control unit adapted to;

receive operational data associated with the processing of workpieces in the manufacturing system;

apply at least a portion of the operational data to the second fault model to determine a health value associated with the second node and apply at least a portion of the operational data to the third fault model to determine a health value associated with the third node; and

determine a health value associated with the first node based on combining the health value associated with the second node and the health value associated with the third node of the system.

10. The apparatus of claim 9, wherein the control unit is adapted to determine the health value associated with the first node of a semiconductor manufacturing system.

11. The apparatus of claim 10, wherein the control unit is adapted to define the first fault model for the semiconductor manufacturing system.

12. The apparatus of claim 9, wherein the control unit is adapted to receive operational data associated with the second and third nodes and to compare the operational data from the second and third nodes to the respective second and third fault models.

13. The apparatus of claim 12, wherein the control unit is adapted to determine if the health value is less than a preselected threshold value, wherein the threshold value is indicative of an acceptable level of performance.

14. The apparatus of claim 9, wherein the control unit is adapted to determine the health value associated with at least one of a factory node, a fab module node, and a processing tool node.

15. The apparatus of claim 14, wherein the control unit is further adapted to define a fourth fault model associated with a second fab module node, determine a health value associated with the second fab module, and determine the health value associated with the factory node based on combining at least two of the health values associated with the fab modules.

16. The apparatus of claim 9, wherein the storage unit is further adapted to store a fault model associated with a node at a sub-system level of a processing tool and to store a fault model associated with a node at a sensor level of the sub-system.

17. An apparatus, comprising:

means for defining a first fault model associated with a first node of a first level of a manufacturing system;

means for defining a second fault model associated with a second node of a second level of the system;

means for defining a third fault model associated with a third node associated with a third level of the system;

means for processing workpieces in the manufacturing system;

means for receiving operational data associated with the processing of the workpieces;

and

means for determining a health value associated the first node based on applying at least a portion of the operational data to the second fault model and applying at least a portion of the operational data to the third fault model.

18. An article comprising one or more machine-readable storage media containing instructions that when executed enable a processor to:

define a first fault model associated with a first node of a first level of a system;

define a second fault model associated with a second node of a second level of the system;

define a third fault model associated a third node associated with a third level of the system;

receive operational data associated with the processing of workpieces in the manufacturing system;

apply at least a portion of the operational data to the second fault model to determine a health value associated with the second node and apply at least a portion of the operational data to the third fault model to determine a health value associated with the third node; and

and

determine a health value associated with the first node based on the health value associated with the second node and the health value associated with the third node of the system.

19. The article of claim 18, wherein the instructions when executed enable the processor to determine the health value associated with the first node of a semiconductor manufacturing system.

20. The article of claim 19, wherein the instructions when executed enable the processor to determine the health value associated with at least one of a factory node, a fab module node, and a processing tool node.

21. The article of claim 18, wherein the instructions when executed enable the processor to receive operational data associated with the second and third nodes and to compare the operational data from the second and third nodes to the respective second and third fault models.

22. The article of claim 21, wherein the instructions when executed enable the processor to determine if the health value is less than a preselected threshold value, wherein the threshold value is indicative of an acceptable level of performance.

23. A method for determining a performance level of a component in a factory having a plurality of process modules that each have a plurality of processing tools, the method comprising:

defining a first fault model for at least one of the processing tools of the process modules;

defining a second fault model for at least one of the process modules of the factory;

defining a third fault model for the factory; and

determining the performance level of the component based on the at least one of the first fault model, second fault model, and third fault model.

24. The method of claim 23, wherein determining the performance level comprises receiving operational data from at least one of the two processing tools and comparing the operational data to at least one of the first fault model, second fault model, and the third fault model.

25. The method of claim 24, wherein determining the performance level comprises determining the performance level of the factory.

26. A manufacturing system, comprising:

a module that includes at least two processing tools capable of processing workpieces, the module adapted to provide operational data associated with the processing of workpieces; and

a fault detection system adapted to;

define a first fault model associated with at least one of the two processing tools;

define a second fault model associated with the module;

define a third fault model associated with the system; and

determine a health value based on operational data and the at least one of the first fault model, second fault model, and third fault model.

27. The system of claim 26, wherein an advanced process control is coupled between the processing tools and the fault detection system.