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Method and apparatus for microarray fabrication

  • US 7,247,337 B1
  • Filed: 12/16/2002
  • Issued: 07/24/2007
  • Est. Priority Date: 12/16/2002
  • Status: Expired due to Fees
First Claim
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1. A method, comprising:

  • removing ozone from an environment by filtration to provide an ozone-reduced environment; and

    fabricating a micro array in said ozone-reduced environment.

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