Method and apparatus for microarray fabrication
First Claim
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1. A method, comprising:
- removing ozone from an environment by filtration to provide an ozone-reduced environment; and
fabricating a micro array in said ozone-reduced environment.
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Abstract
The invention provides a method and apparatus for micro array fabrication exclusive from the impact of a gas. A housing with a gas free chamber provides for improved micro array fabrication with a lower defect rate. The invention provides a housing that excludes a gas such as ozone to prevent interaction with probe construction or attachment. A method of fabricating a micro array in an ozone free environment is also disclosed.
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14 Claims
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1. A method, comprising:
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removing ozone from an environment by filtration to provide an ozone-reduced environment; and fabricating a micro array in said ozone-reduced environment. - View Dependent Claims (7, 8, 9)
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2. A method for fabricating a micro array, comprising:
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in an ozone-filtered environment; (a) depositing a first polymer on a substrate surface; (b) depositing a second polymer on said first polymer; (c) drying said polymers; and (d) curing said polymers to attach them to said substrate surface.
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3. A method for fabricating a micro array, comprising:
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(a) depositing a first polymer on a substrate surface; (b) depositing a monomer stepwise on said polymer to produce a second polymer; and (c) deprotecting said second polymer in an ozone-filtered environment.
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4. A method for fabricating a micro array on a substrate surface, comprising:
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(a) coupling an activated selected nucleoside through a phosphite linkage to said substrate surface to form a substrate bound nucleoside; (b) protecting unreacted hydroxyl groups on said substrate bound nucleoside; (c) oxidizing said phosphite linkage to form a phosphate linkage; and (d) deprotecting said substrate bound nucleoside to generate a reactive site in an ozone-filtered environment. - View Dependent Claims (5)
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6. A method comprising:
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creating an ozone-reduced environment by filtration; and fabricating a micro array in said ozone-reduced environment. - View Dependent Claims (10)
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11. A method, comprising:
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removing ozone from an environment by filtration to provide an ozone-reduced environment, wherein said ozone reduced environment is produced by filtering an atmosphere comprising a gas selected from the group consisting of;
ozone, carbon dioxide, carbon monoxide, hydrogen, helium, neon, xenon, chlorine, fluorine, oxygen, and argon through a carbon filter; andfabricating a micro array in said ozone-reduced environment. - View Dependent Claims (12, 13, 14)
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Specification