Three dimensional programmable device and method for fabricating the same
First Claim
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1. An apparatus comprising:
- at least two stacked planes over a circuit level substrate, each of said planes including individual programmable cells, a cell in each plane comprising a chalcogenide material;
at least one contact; and
a U-shaped electrode coupled to the material and disposed under the material and between the material and the at least one contact, the electrode comprising at least a base and a first and second upstanding portion connected by said base, said first upstanding portion having a different resistance than said second upstanding portion.
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Abstract
A three-dimensional memory device having polycrystalline silicon diode isolation elements for phase change memory cells and method for fabricating the same. The memory device includes a plurality of stacked memory cells to form a three-dimensional memory array. The polycrystalline silicon diode element selects the phase change memory cell. The memory device is fabricated by forming a plurality of phase change memory cells and diode isolation elements on a base layer. Additional layers of memory cells and isolation elements are formed over the initial layer.
114 Citations
16 Claims
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1. An apparatus comprising:
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at least two stacked planes over a circuit level substrate, each of said planes including individual programmable cells, a cell in each plane comprising a chalcogenide material; at least one contact; and a U-shaped electrode coupled to the material and disposed under the material and between the material and the at least one contact, the electrode comprising at least a base and a first and second upstanding portion connected by said base, said first upstanding portion having a different resistance than said second upstanding portion. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A memory device comprising:
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a plurality of programmable cells in a stacked configuration on a circuit level substrate, each of the plurality of programmable cells comprising a chalcogenide material disposed between a first contact and a second contact, the material coupled to one of the first contact and the second contact by a U-shaped electrode comprising at least a base and a first and second upstanding portion connected by said base, said first upstanding portion having a different resistance than said second upstanding portion, wherein at least one of the first contact and the second contact is shared between adjacent programmable cells. - View Dependent Claims (10, 11)
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12. An apparatus comprising:
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a bus; a processor coupled to the bus; a wireless interface coupled to the bus; a memory device including at least two stacked planes over a circuit level substrate, each plane including a individual programmable cell, a cell in each plane comprising a chalcogenide material; at least contact; and a U-shaped electrode coupled to the volume of programmable material, and disposed between to volume of programmable material and the at least one contact, the electrode comprising a first and second upstanding portion connected by a base, said first upstanding portion having a different resistance than said second upstanding portion. - View Dependent Claims (13, 14, 15, 16)
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Specification