Reference oscillator frequency stabilization
First Claim
Patent Images
1. MEMS (Micro Electro Mechanical Systems) reference oscillator with stabilized frequency, characterised in that the oscillator comprises:
- two or more MEMS components, wherein each MEMS component is characterized by a set of properties, anda combiner for selective combination of the desired properties from the MEMS components,characterised in that at least one of the components is a micromechanical bulk acoustic mode silicon resonator with a square plate and electrodes for capacitive coupling arranged on all sides of the plate, wherein the vibration mode is characterised as a 2-D plate expansion that preserves the original square shape.
2 Assignments
0 Petitions
Accused Products
Abstract
Method for stabilizing the frequency of a MEMS (Micro Electro Mechanical Systems) reference oscillator, and a MEMS reference oscillator, wherein the method comprises following steps: using two or more MEMS components, wherein each MEMS component is characterized by a set of properties, and selectively combining the desired properties from the MEMS components.
154 Citations
7 Claims
-
1. MEMS (Micro Electro Mechanical Systems) reference oscillator with stabilized frequency, characterised in that the oscillator comprises:
-
two or more MEMS components, wherein each MEMS component is characterized by a set of properties, and a combiner for selective combination of the desired properties from the MEMS components, characterised in that at least one of the components is a micromechanical bulk acoustic mode silicon resonator with a square plate and electrodes for capacitive coupling arranged on all sides of the plate, wherein the vibration mode is characterised as a 2-D plate expansion that preserves the original square shape. - View Dependent Claims (2, 3, 4)
-
-
5. MEMS (Micro Electro Mechanical Systems) reference oscillator with stabilized frequency, characterised in that the oscillator comprises:
-
two or more MEMS components, wherein each MEMS component is characterized by a set of properties, and a combiner for selective combination of the desired properties from the MEMS components, characterised in that the oscillator utilizes a stable frequency reference obtained by measuring the phase difference of propagating bulk acoustical wave in a micromachined sound-wave guide at fixed positions.
-
-
6. MEMS (Micro Electro Mechanical Systems) reference oscillator with stabilized frequency, characterised in that the oscillator comprises:
-
two or more MEMS components, wherein each MEMS component is characterized by a set of properties, and a combiner for selective combination of the desired properties from the MEMS components, characterised in that the oscillator utilizes a frequency meter based on stable capacitors and stable micromachined thin-film resistors that are used to create the Wien oscillator topology.
-
-
7. MEMS (Micro Electra Mechanical Systems) reference oscillator with stabilized frequency, characterised in that the oscillator comprises:
-
two or more MEMS components, wherein each MEMS component is characterized by a set of properties, and a combiner for selective combination of the desired properties from the MEMS components, characterised in that a capacitor-resistor network, that is part of the Wien oscillator circuit, is used as a frequency meter in which the capacitors and resistors form a bridge circuit the balance of which depends on the frequency of the incoming frequency.
-
Specification