×

Electrochemically fabricated structures having dielectric or active bases and methods of and apparatus for producing such structures

  • US 7,250,101 B2
  • Filed: 05/07/2003
  • Issued: 07/31/2007
  • Est. Priority Date: 05/07/2002
  • Status: Expired due to Term
First Claim
Patent Images

1. An electrochemical fabrication process for producing a three-dimensional structure from a plurality of adhered layers, the process comprising:

  • (A) selectively depositing a first material onto a temporary substrate or onto previously deposited material on the temporary substrate to form a portion of a layer and depositing at least a second material to form another portion of the layer, wherein one of the first material or the second material comprises a structural material and the other comprises a sacrificial material, and wherein the depositing of the first material or the second material comprises an electrodeposition operation;

    (B) forming the plurality of adhered layers such that successive layers are formed adjacent to and adhered to previously formed layers, wherein said forming comprises repeating (A) a plurality of times to form an embedded structure;

    (C) after formation of the plurality of adhered layers, attaching a structural substrate comprising a dielectric material to at least a portion of a layer of the embedded structure and separating the temporary substrate from the embedded structure; and

    (D) after attaching the structural substrate, removing at least a portion of the sacrificial material from multiple layers and from the embedded structure to release the three-dimensional structure.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×