Method of making an X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging
First Claim
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1. A method for manufacturing a sensor for measuring angular velocity in a sensing plane, the method comprising:
- etching a sensing subassembly from a gyroscope wafer, wherein the sensing subassembly includes;
a substantially planar frame parallel to the sensing plane; and
a linkage connected to the frame and comprising a first mass and a second mass laterally disposed in the sensing plane, the linkage mechanically constraining the first mass and the second mass to move in opposite directions perpendicular to the sensing plane,wherein angular velocity in the sensing plane is measurable based on the movement of the first mass and the second mass in opposite directions.
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Abstract
A method for making an angular velocity sensor having two masses which are laterally disposed in an X-Y plane and indirectly connected to a frame is provided. The two masses are linked together by a linkage such that they necessarily move in opposite directions along Z. Angular velocity of the sensor about the Y axis can be sensed by driving the two masses into Z-directed antiphase oscillation and measuring the angular oscillation amplitude thereby imparted to the frame.
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Citations
42 Claims
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1. A method for manufacturing a sensor for measuring angular velocity in a sensing plane, the method comprising:
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etching a sensing subassembly from a gyroscope wafer, wherein the sensing subassembly includes; a substantially planar frame parallel to the sensing plane; and a linkage connected to the frame and comprising a first mass and a second mass laterally disposed in the sensing plane, the linkage mechanically constraining the first mass and the second mass to move in opposite directions perpendicular to the sensing plane, wherein angular velocity in the sensing plane is measurable based on the movement of the first mass and the second mass in opposite directions. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42)
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Specification