Method of forming a via in a microfabricated elastomer structure

• US 7,250,128 B2
• Filed: 04/20/2005
• Issued: 07/31/2007
• Est. Priority Date: 06/28/1999
• Status: Expired due to Term

• Current Assignee: California Institute of Technology
• Original Assignee: California Institute of Technology
• Inventors: Unger, Marc A., Chou, Hou-Pu, Liu, Jian, Scherer, Axel, Quake, Stephen R., Thorsen, Todd A., Hansen, Carl L., Adams, Mark L.
• Primary Examiner(s): Lee; Edmund H.
• Application Number:
  US11/111,264
• Publication Number:
  US 20060054228A1
• Time in Patent Office: 832 Days
• Field of Search: None
• US Class Current: 264/155
• CPC Class Codes: B01J 2219/00355 peristaltic
• CPC Class Codes: B01J 2219/00378 Piezoelectric or ink jet dispensers
• CPC Class Codes: B01J 2219/00396 Membrane valves
• CPC Class Codes: B01J 2219/00398 in multiple arrangements
• CPC Class Codes: B01J 2219/00439 using micromirror arrays
• CPC Class Codes: B01J 2219/005 Beads
• CPC Class Codes: B01J 2219/00527 Sheets
• CPC Class Codes: B01J 2219/00605 the compounds being directly bound or immobilised to solid supports
• CPC Class Codes: B01J 2219/00612 the surface being inorganic
• CPC Class Codes: B01J 2219/00621 by physical means, e.g. trenches, raised areas
• CPC Class Codes: B01J 2219/00659 Two-dimensional arrays
• CPC Class Codes: B01J 2219/00707 separated from the reactor apparatus
• CPC Class Codes: B01J 2219/00722 Nucleotides
• CPC Class Codes: B01J 2219/00725 Peptides
• CPC Class Codes: B01L 2200/025 Align devices or objects to ensure defined positions relative to each other
• CPC Class Codes: B01L 2200/027 for microfluidic devices
• CPC Class Codes: B01L 2200/0605 Metering of fluids
• CPC Class Codes: B01L 2200/10 Integrating sample preparation and analysis in single entity, e.g. lab-on-a-chip concept
• CPC Class Codes: B01L 2300/0681 Filter
• CPC Class Codes: B01L 2300/0861 Configuration of multiple channels and/or chambers in a single devices
• CPC Class Codes: B01L 2300/0887 : Laminated structure
• CPC Class Codes: B01L 2300/123 : Flexible; Elastomeric
• CPC Class Codes: B01L 2300/14 : Means for pressure control
• CPC Class Codes: B01L 2300/18 : Means for temperature control
• CPC Class Codes: B01L 2400/046 : Chemical or electrochemical formation of bubbles
• CPC Class Codes: B01L 2400/0481 : squeezing of channels or chambers
• CPC Class Codes: B01L 2400/0655 : pinch valves
• CPC Class Codes: B01L 2400/0688 : surface tension valves, capillary stop, capillary break
• CPC Class Codes: B01L 3/502707 : characterised by the manufacture of the container or its components by shaping or joining plastic parts B29C59/00, B29C65/00; by laminating B32B37/00; manufacture of microstructural devices in general B81C
• CPC Class Codes: B01L 3/50273 : characterised by the means or forces applied to move the fluids micropumps F04B19/006, of the membrane type F04B43/043
• CPC Class Codes: B01L 3/502738 : characterised by integrated valves microvalves F16K99/0001
• CPC Class Codes: B01L 7/54 : using spatial temperature gradients
• CPC Class Codes: B01L 9/527 : for microfluidic devices, e.g. used for lab-on-a-chip
• CPC Class Codes: B29C 39/02 : for making articles of definite length, i.e. discrete articles
• CPC Class Codes: B32B 2037/1081 : using a magnetic force
• CPC Class Codes: B81B 2201/036 : Micropumps
• CPC Class Codes: B81B 2201/054 : Microvalves
• CPC Class Codes: B81C 1/00119 : Arrangement of basic structures like cavities or channels, e.g. suitable for microfluidic systems
• CPC Class Codes: B81C 2201/019 : Bonding or gluing multiple substrate layers
• CPC Class Codes: C12Q 1/6874 : involving nucleic acid arrays, e.g. sequencing by hybridisation
• CPC Class Codes: C12Q 2535/125 : Allele specific primer extension
• CPC Class Codes: F04B 43/043 : Micropumps
• CPC Class Codes: F15C 5/00 : Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
• CPC Class Codes: F16K 2099/0074 : using photolithography, e.g. etching
• CPC Class Codes: F16K 2099/0076 : using electrical discharge machining [EDM], milling or drilling
• CPC Class Codes: F16K 2099/0078 : using moulding or stamping
• CPC Class Codes: F16K 2099/008 : Multi-layer fabrications
• CPC Class Codes: F16K 2099/0094 : Micropumps
• CPC Class Codes: F16K 31/126 : the fluid acting on a diaphragm, bellows, or the like F16K31/145, F16K31/165, F16K31/365, F16K31/385 take precedence
• CPC Class Codes: F16K 99/0001 : Microvalves microdevices B81B1/00; manufacture or treatment of devices or systems in or on a substrate B81C1/00; microfluidic structures B01L3/5027; micropumps F04B19/006
• CPC Class Codes: F16K 99/0015 : Diaphragm or membrane valves
• CPC Class Codes: F16K 99/0026 : Valves using channel deformation
• CPC Class Codes: F16K 99/0046 : using magnets
• CPC Class Codes: F16K 99/0051 : using electrostatic means
• CPC Class Codes: F16K 99/0055 : actuated by fluids
• CPC Class Codes: F16K 99/0059 : actuated by a pilot fluid
• CPC Class Codes: Y10T 137/2174 : Co-lineal, oppositely-directed power inputs [e.g., impact modulator]
• CPC Class Codes: Y10T 137/2224 : Structure of body of device
• CPC Class Codes: Y10T 137/7879 : Resilient material valve
• CPC Class Codes: Y10T 137/87877 : Single inlet with multiple distinctly valved outlets

Abstract

A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.

Claims

1. A method of forming a via in a microfabricated elastomer structure comprising:

placing an elastomer material in contact with a mold comprising raised features;

curing the elastomer material;

removing the cured elastomer material from the mold

puncturing the cured elastomer material with a rigid hollow member; and

removing the rigid hollow member from the cured elastomer material to reveal a first via opening in fluid communication with the first recess.

2. The method of claim 1 wherein the cured elastomer material is punctured by the rigid hollow member at a recess corresponding to a location of the raised mold feature, thereby ensuring alignment of the via with the recess.

3. The method of claim 1 further comprising:

placing the cured, punctured elastomer material onto a top surface of a second cured elastomer material bearing a second recess corresponding to a location of raised features of a second mold structure; and

puncturing the second cured elastomer material and the first cured elastomer material at the second recess; and

removing the rigid hollow member to reveal a second via in fluid communication with the second recess.

4. The method of claim 3 further comprising:

placing the cured and punctured elastomer layers onto a top surface of an additional cured elastomer layer bearing a further recess corresponding to a location of raised features of a further mold structure; and

puncturing the additional cured elastomer layer and the cured and punctured elastomer layers at the further recess; and

removing the rigid hollow member to reveal an additional via in fluid communication with the further recess.