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Method of forming a via in a microfabricated elastomer structure

  • US 7,250,128 B2
  • Filed: 04/20/2005
  • Issued: 07/31/2007
  • Est. Priority Date: 06/28/1999
  • Status: Expired due to Term
First Claim
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1. A method of forming a via in a microfabricated elastomer structure comprising:

  • placing an elastomer material in contact with a mold comprising raised features;

    curing the elastomer material;

    removing the cured elastomer material from the moldpuncturing the cured elastomer material with a rigid hollow member; and

    removing the rigid hollow member from the cured elastomer material to reveal a first via opening in fluid communication with the first recess.

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