Probe device
First Claim
Patent Images
1. A probe device comprising:
- a cantilever comprising a probe allocated to be opposed to a surface of a sample;
means for feeding back a deflection signal value of the cantilever, thereby self-exciting and vibrating the cantilever at a predominant frequency;
means for applying a bias to the sample or the probe; and
means for measuring a frequency shift caused by a charge-transfer force which acts between the cantilever and the sample.
1 Assignment
0 Petitions
Accused Products
Abstract
A probe device comprises a cantilever comprising a probe allocated to be opposed to a surface of a sample, means for feeding back a vibration amplitude value of the cantilever, thereby self-exciting and vibrating the cantilever at a predetermined frequency, means for applying a bias to the sample or the probe, and means for measuring a frequency shift caused by a charge-transfer force which acts between the cantilever and the sample.
-
Citations
6 Claims
-
1. A probe device comprising:
-
a cantilever comprising a probe allocated to be opposed to a surface of a sample; means for feeding back a deflection signal value of the cantilever, thereby self-exciting and vibrating the cantilever at a predominant frequency; means for applying a bias to the sample or the probe; and means for measuring a frequency shift caused by a charge-transfer force which acts between the cantilever and the sample. - View Dependent Claims (2, 3, 4, 5, 6)
-
Specification