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Probe testing structure

  • US 7,250,626 B2
  • Filed: 03/05/2004
  • Issued: 07/31/2007
  • Est. Priority Date: 10/22/2003
  • Status: Active Grant
First Claim
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1. A calibration substrate for calibrating a probe comprising:

  • (a) a first conductive member associated with a first calibration test site and supported by said substrate suitable to be electrically interconnected with a first signal path of said probe;

    (b) a second conductive member associated with said first calibration test site and supported by said substrate suitable to be electrically interconnected with a second signal path of said probe, said second conductive member electrically isolated from said first conductive member;

    (c) a third conductive member associated with said first calibration test site and supported by said substrate suitable to be electrically interconnected with a ground path of said probe, said third conductive member electrically isolated from each of said first and second conductive members;

    (d) a fourth conductive member associated with a second calibration test site, spaced apart from said first calibration test site, and supported by said substrate suitable to be electrically interconnected with a first signal path of another probe;

    (e) a fifth conductive member associated with said second calibration test site supported by said substrate suitable to be electrically interconnected with a second signal path of said another probe, said fifth conductive member electrically isolated from said fourth conductive member;

    (f) a sixth conductive member associated with said second calibration test site supported by said substrate suitable to be electrically interconnected with a ground path of said another probe, said sixth conductive member electrically isolated from each of said fourth and fifth conductive members; and

    (g) a resistive member supported by said substrate and positioned between said third conductive member and said sixth conductive member and extending 100% of the distance between said third conductive member and said sixth conductive member and having a width substantially equal to that of said third and sixth conductive members.

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