Method of fabricating vertical structure LEDs
First Claim
1. A vertical light emitting device, comprising:
- a support layer;
a first GaN-based layer;
a first electrode disposed between the support layer and the first GaN-based layer such that the first GaN-based layer is over the first electrode;
a second GaN-based layer;
a light emitting layer disposed between the first and second GaN-based layers;
a passivation layer over exposed portions of the first GaN-based layer, of the light emitting layer, and of the second GaN-based layer; and
a second electrode over the second GaN-based layer.
4 Assignments
0 Petitions
Accused Products
Abstract
A method of fabricating semiconductor devices, such as GaN LEDs, on insulating substrates, such as sapphire. Semiconductor layers are produced on the insulating substrate using normal semiconductor processing techniques. Trenches that define the boundaries of the individual devices are then formed through the semiconductor layers and into the insulating substrate, beneficially by using inductive coupled plasma reactive ion etching. The trenches are then filled with an easily removed layer. A metal support structure is then formed on the semiconductor layers (such as by plating or by deposition) and the insulating substrate is removed. Electrical contacts, a passivation layer, and metallic pads are then added to the individual devices, and the individual devices are then diced out.
130 Citations
13 Claims
-
1. A vertical light emitting device, comprising:
-
a support layer; a first GaN-based layer; a first electrode disposed between the support layer and the first GaN-based layer such that the first GaN-based layer is over the first electrode; a second GaN-based layer; a light emitting layer disposed between the first and second GaN-based layers; a passivation layer over exposed portions of the first GaN-based layer, of the light emitting layer, and of the second GaN-based layer; and a second electrode over the second GaN-based layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
-
-
13. A vertical light emitting device, comprising:
-
a metallic support layer; a first GaN-based layer formed adjacent to the metallic support layer; an electrode formed between the first GaN-based layer and the metallic support layer; a second GaN-based layer; a light emitting layer disposed between the first and second GaN-based layers; and a plurality of passivation layers surrounding at least two side portions of the first GaN-based layer, of the light emitting layer, and of the second GaN-based layer such that the electrode is disposed between the plurality of passivation layers.
-
Specification