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Probe station with low inductance path

  • US 7,250,779 B2
  • Filed: 09/25/2003
  • Issued: 07/31/2007
  • Est. Priority Date: 11/25/2002
  • Status: Active Grant
First Claim
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1. A probe assembly for probing an electrical device, said probe assembly comprising:

  • (a) a chuck having a first conductive member with a support surface suitable for supporting an electrical device; and

    (b) a second conductive member having a substantially planar surface spaced apart from, and opposed to, said support surface of said chuck, wherein said support surface is electrically interconnected to said second conductive member;

    (c) wherein said second conductive member is electrically interconnected to a test signal of said electrical device.

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