Probe station with low inductance path
First Claim
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1. A probe assembly for probing an electrical device, said probe assembly comprising:
- (a) a chuck having a first conductive member with a support surface suitable for supporting an electrical device; and
(b) a second conductive member having a substantially planar surface spaced apart from, and opposed to, said support surface of said chuck, wherein said support surface is electrically interconnected to said second conductive member;
(c) wherein said second conductive member is electrically interconnected to a test signal of said electrical device.
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Abstract
A probe assembly suitable for making test measurements using test signals having high currents. The disclosed probe assembly provides for a test signal exhibiting relatively low inductance when compared to existing probe assemblies by preferably reducing the electrical path distance between the test instrumentation and the electrical device being tested.
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Citations
9 Claims
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1. A probe assembly for probing an electrical device, said probe assembly comprising:
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(a) a chuck having a first conductive member with a support surface suitable for supporting an electrical device; and (b) a second conductive member having a substantially planar surface spaced apart from, and opposed to, said support surface of said chuck, wherein said support surface is electrically interconnected to said second conductive member; (c) wherein said second conductive member is electrically interconnected to a test signal of said electrical device. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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Specification