Packaging of a micro-magnetic switch with a patterned permanent magnet
First Claim
1. A method for packaging a plurality of micro-magnetic switches, comprising:
- (A) providing a first substrate having a plurality of cantilevers spaced apart on a first surface of the first substrate, each cantilever residing in a corresponding cavity in the first surface the first substrate;
(B) bonding a first surface of a second substrate to the first surface of the first substrate, wherein each cantilever is thereby housed in a corresponding space formed between the first and second substrates, the space corresponding to each cantilever formed at least in part by the corresponding cavity in the first surface of the first substrate; and
(C) forming a magnetic layer on at least one of the first and second substrates to induce a magnetization in a magnetic material of each housed cantilever.
1 Assignment
0 Petitions
Accused Products
Abstract
A method and apparatus for packaging a plurality of micro-magnetic switches is described. A bonded substrate structure includes a first substrate, a second substrate, and a magnetic layer. The first substrate has a plurality of cantilevers formed thereon. The second substrate has a first surface that is bonded to the first substrate. Each cantilever of the plurality of cantilevers on the first substrate is housed in a corresponding space formed between the first substrate and the second substrate. The magnetic layer is formed on a second surface of the first and/or second substrate to induce a magnetization in a magnetic material of each housed cantilever. The bonded substrate structure is singulated to form a plurality of separate micro-magnetic switch packages. Each micro-magnetic switch package of the plurality of micro-magnetic switch packages includes at least one housed cantilever.
72 Citations
20 Claims
-
1. A method for packaging a plurality of micro-magnetic switches, comprising:
-
(A) providing a first substrate having a plurality of cantilevers spaced apart on a first surface of the first substrate, each cantilever residing in a corresponding cavity in the first surface the first substrate; (B) bonding a first surface of a second substrate to the first surface of the first substrate, wherein each cantilever is thereby housed in a corresponding space formed between the first and second substrates, the space corresponding to each cantilever formed at least in part by the corresponding cavity in the first surface of the first substrate; and (C) forming a magnetic layer on at least one of the first and second substrates to induce a magnetization in a magnetic material of each housed cantilever. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
-
-
14. An apparatus for packaging a plurality of micro-magnetic switches, comprising:
-
a bonded substrate structure having a first substrate with a plurality of cantilevers formed thereon, a second substrate with a first surface that is bonded to the first substrate, wherein each cantilever of the plurality of cantilevers on the first substrate is housed in a corresponding space formed between said first substrate and said second substrate, wherein a first surface of the first substrate has a plurality of cavities formed therein, wherein the space corresponding to each cantilever is formed at least in part by a corresponding cavity of the plurality of cavities, and a magnetic layer formed on at least one of said first substrate and said second substrate to induce a magnetization in a magnetic material of each housed cantilever; wherein the bonded substrate structure is singulated to form a plurality of separate micro-magnetic switch packages, each micro-magnetic switch package of the plurality of micro-magnetic switch packages including at least one housed cantilever. - View Dependent Claims (15, 16, 17, 18, 19, 20)
-
Specification