Implantable mechanical pressure sensor and method of manufacturing the same

• US 7,252,006 B2
• Filed: 06/07/2005
• Issued: 08/07/2007
• Est. Priority Date: 06/07/2004
• Status: Expired due to Fees

• Current Assignee: California Institute of Technology
• Original Assignee: California Institute of Technology
• Inventors: Meng, Ellis, Tai, Yu-Chong, Humayun, Mark, Rodger, Damien C., Chen, Po-Jui
• Primary Examiner(s): Allen; Andre J.
• Application Number:
  US11/148,124
• Publication Number:
  US 20050268722A1
• Time in Patent Office: 791 Days
• Field of Search: 737/32, 737/43, 737/00, 374/131, 600/486, 604/9
• US Class Current: 73/700
• CPC Class Codes: A61B 2562/02 Details of sensors specially adapted for in-vivo measurements
• CPC Class Codes: A61B 2562/028 Microscale sensors, e.g. electromechanical sensors [MEMS]
• CPC Class Codes: A61B 3/16 for measuring intraocular pressure, e.g. tonometers
• CPC Class Codes: G01L 7/045 with optical transmitting or indicating means

Abstract

A biocompatible, mechanical, micromachined pressure sensor and methods of manufacturing such a pressure sensor are provided. The pressure sensor of the current invention includes a high-aspect-ratio curved-tube structure fabricated through a one-layer parylene process. The pressure sensor of the current invention requires zero power consumption and indicates the pressure variation by changes of the in situ in-plane motion of the sensor, which can be gauged externally by a direct and convenient optical observation. In one embodiment, the pressure sensor of the current invention has been shown to work as an IOP sensor for eye implantation where the intraocular in-plane motion of the sensor can be recorded from outside of the eye, such that the intraocular pressure in glaucoma patients can be constantly monitored.

Claims

1. An implantable mechanical passive pressure sensor comprising:

at least one micromachined flexible closed hollow body having first and second ends, said body being disposed on a substrate and describing at least one curve, wherein one of said ends is affixed to said substrate and the second of said ends and at least the portion of the body adjacent to said second end is allowed to move within a two-dimensional plane,

wherein the pressure within said closed body is fixed, and wherein the arc of the at least one curve of the body is defined by the relative pressure between the internal pressure of the body and the surrounding environment, such that a change in the pressure surrounding the body causes a change in the arc of the at least one curve resulting in a measurable displacement of the second end of said body relative to the substrate, and

wherein the displacement of the second end of said body provides a measurement of the environmental pressure surrounding the body, said displacement capable of being monitored visually.

2. The implantable mechanical passive pressure sensor defined in claim 1, wherein the extent of the curve defined by the body is described by the coiled angle of the body (θ

) such that θ

is at least 360°

.

3. The implantable mechanical passive pressure sensor defined in claim 2, wherein the body is formed as a bourdon tube.

4. The implantable mechanical passive pressure sensor defined in claim 2, wherein the first end is disposed at the center of the spiral defined by the body.

5. The implantable mechanical passive pressure sensor defined in claim 2, wherein the first end is disposed at the exterior of the spiral defined by the body.

6. The implantable mechanical passive pressure sensor defined in claim 1, wherein the extent of the curve defined by the body is described by the coiled angle of the body (θ

) such that θ

is less than 360°

.

7. The implantable mechanical passive pressure sensor defined in claim 6, wherein the body is formed as a hook.

8. The implantable mechanical passive pressure sensor defined in claim 1, wherein the first end is central to the spiral of the body and the second end further comprises a straight indicator arm distal to the curve defined by the body.

9. The implantable mechanical passive pressure sensor defined in claim 8, wherein the sensor comprises at least two flexible closed hollow bodies disposed on the substrate such that the second ends of each of the hollow bodies are in a diametric collinear arrangement such that when the pressure of the surrounding atmosphere changes the second ends of the at least two bodies are displaced in opposite directions.

10. The implantable mechanical passive pressure sensor defined in claim 1, wherein the body comprises a plurality of curved sections each of said curved sections being linked end to end with other curved sections in a zigzag arrangement, wherein the curved section at the first end of the body is fixedly attached to the substrate and the remaining curved sections are free to move, such that a change in the pressure surrounding the body produces a linear displacement of the body axially away from the first end.

11. The implantable mechanical passive pressure sensor defined in claim 1, wherein the sensor comprises a plurality of such bodies disposed on a single substrate.

12. The implantable mechanical passive pressure sensor defined in claim 11, wherein the bodies are arranged in a regular array.

13. The implantable mechanical passive pressure sensor defined in claim 1, wherein the aspect ratio between the height and width of the body is greater than 1.

14. The implantable mechanical passive pressure sensor defined in claim 1, wherein the displacement of the second end is both angular and radial.

15. The implantable mechanical passive pressure sensor defined in claim 1, wherein the displacement of the second end is optically measurable.

16. The implantable mechanical passive pressure sensor defined in claim 15, wherein the displacement may be measured with standard ophthalmologic equipment selected from the group consisting of stereoscopes and magnifiers.

17. The implantable mechanical passive pressure sensor defined in claim 1, wherein the fixed pressure within the body is about 1 atm.

18. The implantable mechanical passive pressure sensor defined in claim 1, wherein the sensor has a sensitivity of at least 0.22 degree/mmHg.

19. The implantable mechanical passive pressure sensor defined in claim 1, wherein the sensor has a sensitivity of at least 0.13 degree/mmHg.

20. The implantable mechanical passive pressure sensor defined in claim 1, wherein the sensor is made of a biocompatible material.

21. The implantable mechanical passive pressure sensor defined in claim 1, wherein the biocompatible material is parylene.

22. The implantable mechanical passive pressure sensor defined in claim 21, wherein the parylene is selected from the group consisting of parylene C, parylene N, parylene D, parylene F, parylene A, parylene AM, parylene HT.

23. The implantable mechanical passive pressure sensor defined in claim 1, wherein the pressure sensor is designed for implantation into the eye for measuring the IOP.

24. The implantable mechanical passive pressure sensor defined in claim 1, further comprising at least one measurement fiducials disposed on the substrate adjacent to the second end to provide a scale for determining the scope of the displacement.

25. The implantable mechanical passive pressure sensor defined in claim 1, wherein the body is disposed within a depression on the substrate.

26. An intraocular passive pressure sensor for measuring the intraocular pressure, comprising:

at least one micromachined flexible closed hollow body formed of a biocompatible material having first and second ends, said body being disposed on a substrate and describing at least one curve, wherein one of said ends is affixed to said substrate and the second of said ends and at least the portion of the body adjacent to said second end is allowed to move within a two-dimensional plane,

wherein the pressure within said closed body is fixed, and wherein the arc of the at least one curve of the body is defined by the relative pressure between the internal pressure of the body and the surrounding environment, such that a change in the pressure surrounding the body causes a change in the arc of the at least one curve resulting in a measurable displacement of the second end of said body relative to the substrate, and

wherein the displacement of the second end of said body provides a measurement of the environmental pressure surrounding the body, said displacement capable of being monitored visually.