Pressure sensor system with semiconductor chip and antenna member
First Claim
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1. A pressure sensor system, comprising:
- a semiconductor chip comprising a pressure sensor and a transmit control part to which a signal based on a measurement value of the pressure sensor is inputted; and
an antenna member to which said semiconductor chip is fixed, the antenna member comprising an antenna electrically connected to the transmit control part, whereinsaid antenna member comprises a notched part in an area which overlaps said semiconductor chip.
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Abstract
In order to realize a compact wireless pressure sensor system which transmits an accurate pressure value, the present invention provides a pressure sensor system constructed at least by a silicon chip on which a circuit operated by electromagnetic wave energy is mounted, and a film which supports an antenna, in which film a through-hole is provided in the vicinity of a diaphragm part.
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Citations
9 Claims
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1. A pressure sensor system, comprising:
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a semiconductor chip comprising a pressure sensor and a transmit control part to which a signal based on a measurement value of the pressure sensor is inputted; and an antenna member to which said semiconductor chip is fixed, the antenna member comprising an antenna electrically connected to the transmit control part, wherein said antenna member comprises a notched part in an area which overlaps said semiconductor chip. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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Specification