Surface area deposition trap

• US 7,252,011 B2
• Filed: 03/11/2002
• Issued: 08/07/2007
• Est. Priority Date: 03/11/2002
• Status: Expired due to Term

• Current Assignee: MKS Instruments Incorporated
• Original Assignee: MKS Instruments Incorporated
• Inventors: Traverso, Robert
• Primary Examiner(s): Colilla; Daniel J.
• Assistant Examiner(s): FERGUSON SAMRETH, MARISSA LIANA
• Application Number:
  US10/095,143
• Publication Number:
  US 20030167852A1
• Time in Patent Office: 1,975 Days
• Field of Search: 737/56, 737/24, 73715-718, 737/06, 210/108, 210/87, 210/295, 210/301, 210/300, 210/323, 600/485
• US Class Current: 73/756
• CPC Class Codes: G01L 19/0636 using particle filters

Abstract

The disclosed pressure transducer assembly includes a housing, a pressure sensor disposed within the housing, a coupling establishing a sealed pathway between the housing and an external source of gas or fluid, and a deposition trap disposed in the pathway. The deposition trap provides a plurality of channels, each of the channels being narrower than the pathway.

Claims

1. A pressure transducer assembly, comprising:

A) a housing;

B) a pressure sensor disposed in the housing;

C) a coupling between the housing and an external source of gas or fluid, the coupling and housing establishing a sealed pathway between the external source and the pressure sensor;

D) a deposition trap disposed in the pathway, the deposition trap defining a plurality of channels formed by a plurality of tubes, each of the tubes having an inner surface and an outer surface, and each of the channels being narrower than the pathway, wherein the particulates can be deposited on at least a portion of the inner and outer surface of the tubes during operation of the transducer assembly.

2. An assembly according to claim 1, wherein each of the inner tubes providing one of the channels and at least a portion of the outer surface of the inner tube provides a deposition trap surface.

3. An assembly according to claim 2, the deposition trap including an outer casing, each of the inner tubes being disposed within the outer casing.

4. An assembly according to claim 1, each of the channels being characterized by an aspect ratio, the aspect ratio of each channel being a ratio of a length of the channel to a width of the channel, the aspect ratio of each channel being greater than twenty.

5. An assembly according to claim 1, the housing defining an inlet tube, the coupling attaching to the inlet tube.

6. An assembly according to claim 5, at least part of the deposition trap being disposed in the inlet tube.

7. An assembly according to claim 5, at least part of the deposition trap being disposed outside the inlet tube.

8. An assembly according to claim 1, the pressure sensor including a flexible diaphragm.

9. An assembly according to claim 1, a pressure of the gas or fluid in the pathway being less than 0.02 Torr.

10. An assembly according to claim 1, the deposition trap being mounted in the pathway without welding.

11. A transducer according to claim 1 wherein the channels have a length and a diameter and the length of the channel is longer than the diameter of the channel.

12. A transducer according to claim 1 wherein the plurality of channels each have a cross sectional area and a length and the cross sectional area is substantially constant for a substantial part of the length of each of the plurality of the channels.

13. A transducer according to claim 1 wherein at least one of the plurality of channels has a cross sectional area that is constant along the length of the trap.

14. A transducer according to claim 1 wherein the channels are adapted for very low pressure and molecules are more likely to hit the wall of a channel than another molecule.

15. A transducer according to claim 1 wherein the channels have a length and a cross sectional area and the cross-sectional area is non circular along the length of the channels.

16. A pressure transducer, comprising:

(A) a pressure sensor;

(B) a coupling defining an internal passage, the coupling being connectable to an external source of gas or fluid, a pressure of the gas or fluid being less than 0.02 Torr, the internal passage providing at least a portion of a sealed pathway between the external source and the sensor when the coupling is connected to the external source;

(C) a deposition trap defining a plurality of channels formed of a plurality of tubes, the tubes having an inner surface and an outer surface, the structure being mounted without welding to the coupling such that molecules flowing through the internal passage pass through the channels before reaching the sensor, wherein the particulates can be deposited on at least a portion of the inner and outer surface of the tubes during operation of the transducer assembly.

17. A transducer according to claim 16, the pressure sensor including a flexible diaphragm and a conductor, the diaphragm and conductor being characterized by a capacitance, the capacitance changing in response to flexing of the diaphragm, the diaphragm flexing in response to changes in pressure of the gas or fluid in the external source when the coupling is connected to the external source.

18. A transducer according to claim 17, molecules flowing through the internal passage to the diaphragm pass through the channels before reaching the diaphragm.

19. A transducer according to claim 16, the coupling comprising an inlet tube.

20. A transducer according to claim 16, wherein at least a portion of the outer surface of the plurality of tubes provides a deposition trap surface.

21. A transducer according to claim 20, the channels include spaces between the tubes.

22. A transducer according to claim 16, at least some of the channels being substantially cylindrical.

23. A transducer according to claim 16 wherein the channels have a length and a diameter and the length of the channel is longer than the diameter of the channel.

24. A transducer according to claim 16 wherein the plurality of channels each have a cross sectional area and a length and the cross sectional area is substantially constant for a substantial part of the length of each of the plurality of the channels.

25. A transducer according to claim 16 wherein at least one of the plurality of channels has a cross sectional area that is constant along the length of the structure.

26. A transducer according to claim 16 wherein the channels are adapted for very low pressure and molecules are more likely to hit the wall of a channel than another molecule.

27. A transducer according to claim 16 wherein the channels have a length and a cross sectional area and the cross-sectional area is non circular along the length of the channels.

34. A transducer according to claim 18 wherein the channels are adapted for very low pressure and molecules are more likely to hit the wall of a channel than another molecule.

35. A transducer according to claim 18 wherein the channels have a length and a cross sectional area and the cross-sectional area is non circular along the length of the channels.

28. A transducer comprising:

(A) a housing;

(B) a flexible diaphragm disposed in the housing, the diaphragm defining a first chamber and a second chamber within the housing;

(C) a conductor disposed in the second chamber, the diaphragm and conductor being characterized by a capacitance;

(D) an inlet tube configured to provide at least a portion of a sealed path between the first chamber and an external source of gas or fluid, a pressure of the gas or fluid in the external source being less than 0.02 Torr, the capacitance changing in response to changes in the pressure; and

(E) a deposition trap defining a plurality of channels formed of a plurality of tubes, each of the tubes having an inner surface and an outer surface, each of the channels being narrower than the path, the structure being mounted without welding in the path such that molecules flowing from the external source to the first chamber pass through the channels, wherein the particulates can be deposited on at least a portion of the inner and outer surface of the tubes during operation of the transducer assembly.

29. A transducer according to claim 28, at least some of the channels being cylindrical.

30. A transducer according to claim 28, wherein the structure includes a deposition trap surface on at least a portion of the outer surface of the plurality of tubes.

31. A transducer according to claim 28 wherein the channels have a length and a diameter and the length of the channel is longer than the diameter of the channel.

32. A transducer according to claim 28 wherein the plurality of channels each have a cross sectional area and a length and the cross sectional area is substantially constant for a substantial part of the length of each of the plurality of the channels.

33. A transducer according to claim 28 wherein at least one of the plurality of channels has a cross sectional area that is constant along the length of the structure.

36. A pressure transducer assembly, comprising:

A) a housing;

B) a pressure sensor disposed in the housing;

C) a coupling between the housing and an external source of gas or fluid, the coupling and housing establishing a sealed pathway between the external source and the pressure sensor;

D) a deposition trap disposed in the pathway, the deposition trap defining a plurality of tubes formed by a rolled corrugated sheet forming a plurality of trapping surfaces, each of the channels being narrower than the pathway.