Substrate, method of preparing a substrate, method of measurement, lithographic apparatus, device manufacturing method and device manufactured thereby, and machine-readable storage medium
First Claim
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1. A method of preparing a substrate, said method comprising:
- exposing the substrate with a plurality of images, each of the plurality of images having a different orientation with respect to a crystal axis of the substrate; and
anisotropically etching the substrate to form a plurality of alignment markers, a location of at least a portion of each of the plurality of alignment markers substantially coinciding with a location of a corresponding portion of a corresponding one of the plurality of images,wherein the orientation of each of the plurality of images is within four degrees of the orientation of each other one of the plurality of images.
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Abstract
In a method according to one embodiment of the invention, a plurality of markers are printed in resist on a substrate at a range of angles relative to a crystal axis of the substrate. The markers are etched in to the substrate using an anisotropic etch process, such that after the etch the apparent positions of the markers are dependent on their orientation relative to the crystal axis. The apparent positions of the markers are measured, and from this information the orientation of the crystal axis is derived.
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Citations
12 Claims
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1. A method of preparing a substrate, said method comprising:
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exposing the substrate with a plurality of images, each of the plurality of images having a different orientation with respect to a crystal axis of the substrate; and anisotropically etching the substrate to form a plurality of alignment markers, a location of at least a portion of each of the plurality of alignment markers substantially coinciding with a location of a corresponding portion of a corresponding one of the plurality of images, wherein the orientation of each of the plurality of images is within four degrees of the orientation of each other one of the plurality of images. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method of preparing a substrate comprising:
- providing on a surface of the substrate a plurality of alignment markers, each of said plurality of alignment markers having a different orientation relative to a crystal axis of the substrate,
wherein, for each of said plurality of alignment markers, a distance between an apparent position of the marker and an actual position of an element of the marker is dependent on the orientation of the marker. - View Dependent Claims (10, 11, 12)
- providing on a surface of the substrate a plurality of alignment markers, each of said plurality of alignment markers having a different orientation relative to a crystal axis of the substrate,
Specification