Method to improve mechanical strength of low-k dielectric film using modulated UV exposure

• US 7,253,125 B1
• Filed: 04/16/2004
• Issued: 08/07/2007
• Est. Priority Date: 04/16/2004
• Status: Active Grant

• Current Assignee: Novellus Systems Incorporated (Lam Research Corporation)
• Original Assignee: Novellus Systems Incorporated (Lam Research Corporation)
• Inventors: Srinivasan, Easwar, Fu, Haiying, Cho, Seon-Mee, Bandyopadhyay, Ananda K., Mordo, David
• Primary Examiner(s): SMITH, BRADLEY
• Application Number:
  US10/825,888
• Time in Patent Office: 1,208 Days
• Field of Search: 438/795, 257/E21.347
• US Class Current: 438/795
• CPC Class Codes: H01L 21/02126 the material containing Si, O, and at least one of H, N, C, F, or other non-metal elements, e.g. SiOC, SiOC:H or SiONC
• CPC Class Codes: H01L 21/02203 the layer being porous
• CPC Class Codes: H01L 21/02216 the compound being a molecule comprising at least one silicon-oxygen bond and the compound having hydrogen or an organic group attached to the silicon or oxygen, e.g. a siloxane
• CPC Class Codes: H01L 21/02274 in the presence of a plasma [PECVD]
• CPC Class Codes: H01L 21/02348 treatment by exposure to UV light
• CPC Class Codes: H01L 21/3105 After-treatment
• CPC Class Codes: H01L 21/31633 Deposition of carbon doped silicon oxide, e.g. SiOC
• CPC Class Codes: H01L 21/31695 Deposition of porous oxides or porous glassy oxides or oxide based porous glass

Abstract

Methods and apparatus for improving mechanical properties of a dielectric film on a substrate are provided. In some embodiments, the dielectric film is a carbon-doped oxide (CDO). The methods involve the use of modulated ultraviolet radiation to increase the mechanical strength while limiting shrinkage and limiting any increases in the dielectric constant of the film. Methods improve film hardness, modulus and cohesive strength, which provide better integration capability and improved performance in the subsequent device fabrication procedures such as chemical mechanical polishing (CMP) and packaging.

Claims

1. A method of treating dielectric film on a substrate, the method comprising:

(a) exposing the dielectric film to ultraviolet radiation with a first light intensity during a first time increment;

(b) exposing the dielectric film to ultraviolet radiation with a second light intensity during a second time increment, wherein the first and second light intensities are different; and

(c) repeating (a) and (b) at least twice in a manner that provides modulated ultraviolet radiation exposure that significantly increases the hardness and modulus of the dielectric film.

2. A method of claim 1, wherein the dielectric film is a carbon-doped oxide (CDO) film.

3. A method of claim 2, wherein the carbon-doped oxide (CDO) film is a porous film.

4. A method of claim 3, wherein the hardness of the porous dielectric film is increased by about 0.9 GPa or greater.

5. A method of claim 3, wherein the modulus of the porous dielectric film is increased by about 5.0 GPa or greater.

6. The method of claim 3, wherein the porous dielectric film shrinks by no more than about 25% and more preferably by no more than about 15% during the method.

7. A method of claim 3, wherein the dielectric constant of the porous dielectric film increases by no greater than about 8% during the method and more preferably by no greater than 4%.

8. A method of claim 1, wherein the first and second light intensities differ by a value up to about 3 W/cm².

9. A method of claim 1, wherein one of the first and second light intensities is about 0 W/cm².

10. A method of claim 1, wherein the ultraviolet radiation in (a), (b) and (c) is provided by a single ultraviolet radiation source.

11. A method of claim 1, wherein the ultraviolet radiation is provided by one or more sources modulated to provide modulated ultraviolet radiation.

12. A method of claim 11, wherein of the modulated ultraviolet radiation has a duty cycle ranging between about 1% and about 90%.

13. A method of claim 11, wherein the modulated ultraviolet radiation has a period of between about 1μ

seconds and 5 minutes.

14. A method of claim 1, wherein the substrate exposure to ultraviolet radiation in (a), (b) and (c) occurs for a total time ranging between about 1 second and about 60 minutes.

15. A method of claim 1, wherein the ultraviolet radiation in (a), (b) and (c) comprises one or more wavelengths ranging between about 150 nm and about 800 nm.

16. A method of claim 1, wherein (a), (b) and (c) are performed at pressures ranging between about 1 μ

Torr and about 760 Torr (atmospheric pressure).

17. A method of claim 1, wherein a purge procedure is performed after (a) and before (b), after (b) and before (c), the purge procedure involving the use of one or more of Ar, He, N₂, CO₂, H₂, O₂, and C₂H₄.

18. A method of claim 1, wherein (a), (b) and (c) occur at a constant substrate temperature between about −

10 and about 450 degrees.

19. A method of treating dielectric film on a substrate, the method comprising:

(a) exposing the dielectric film to ultraviolet radiation with a first light intensity during a first time increment;

(b) exposing the dielectric film to ultraviolet radiation with a second light intensity during a second time increment, wherein the first and second light intensities are different and not zero; and

(c) repeating (a) and (b) in a manner that provides modulated ultraviolet radiation exposure that significantly increases the hardness and modulus of the dielectric film.

20. The method of claim 19, wherein the first light intensity varies each time (a) is repeated.

21. The method of claim 20, wherein the first light intensity varies randomly.

22. The method of claim 20, wherein the first light intensity decreases each time (a) is repeated.

23. The method of claim 20, wherein the second light intensity varies each time (b) is repeated.

24. The method of claim 19, wherein the dielectric film is a non-porous film.

25. The method of claim 19, wherein the dielectric film is a carbon-doped oxide (CDO) film.

26. The method of claim 25, wherein the carbon-doped oxide (CDO) film is a porous film.

27. The method of claim 19, wherein the first and second light intensities differ by a value up to about 3 W/cm².

28. The method of claim 19, wherein the substrate exposure to ultraviolet radiation in (a), (b) and (c) occurs for a total time ranging between about 1 second and about 60 minutes.

29. The method of claim 19, wherein the ultraviolet radiation in (a), (b) and (c) comprises one or more wavelengths ranging between about 150 nm and about 800 mm.

30. The method of claim 19, wherein (a), (b) and (c) are performed at pressures ranging between about 1 μ

Torr and about 760 Torr (atmospheric pressure).

31. The method of claim 19, wherein a purge procedure is performed after (a) and before (b), after (b) and before (c), the purge procedure involving the use of one or more of Ar, He, N₂, CO₂, H₂, O₂, and C₂H₄.

32. The method of claim 19, wherein (a), (b) and (c) occur at a constant substrate temperature between about 20 and about 450 degrees Celsius.