Active cantilever for nanomachining and metrology

• US 7,253,407 B1
• Filed: 03/22/2005
• Issued: 08/07/2007
• Est. Priority Date: 03/08/2001
• Status: Expired due to Fees

• Current Assignee: Terraspan LLC
• Original Assignee: General Nanotechnology LLC
• Inventors: Kley, Victor B.
• Primary Examiner(s): Wells, Nikita
• Application Number:
  US11/087,874
• Time in Patent Office: 868 Days
• Field of Search: None
• US Class Current: 250/306
• CPC Class Codes: B82Y 35/00 Methods or apparatus for measurement or analysis of nanostructures
• CPC Class Codes: G01Q 70/02 Probe holders

Abstract

A probe assembly suited for use in a scanning probe microscope (SPM) system includes a cantilever having an attachment to a main body portion. A suitable tip disposed at the free end of the cantilever provides various functions. According to various embodiments of the invention, an interference structure is provided to limit the range of deflection of the probe.

Claims

1. A probe for use in a scanning probe microscope system comprising:

a base member having;

a cantilever having a fixed end and a free end, the fixed end attached to the base member;

a tip platform suitable for receiving a tip device, the tip platform having a flexural joint connecting it to the free end;

a suspended segment having a first attachment to the base member and having an extension portion spaced apart from the base and having a second attachment proximate the flexural joint,

wherein dimensional changes in the suspended segment result in movement of the tip platform about the flexural joint.

2. A scanning microscope system comprising a controller unit, a translation unit coupled to received translation signals from the controller unit, and a probe assembly as claimed in claim 1 coupled to the translation unit, the translation unit operable to effect incremental motion in 3-dimensional space in increments of about one micron or less.

3. A probe device for use in a scanning probe microscope comprising:

a base member;

a cantilever extending from the base member, the cantilever having a free end, the cantilever further having a kinetic segment disposed proximate the free end and configured to hold a tip device having micron-sized dimensions, the kinetic segment comprising one or more action members cooperatively configured to effect kinetic action of a tip device held therein; and

an actuator segment having a first attachment to the base member, the actuator segment further having an active portion disposed above and spaced apart from the base member, the actuator segment further having a second attachment to at least one of the action members, wherein dimensional changes of the active portion effect kinetic action among the action members,

the action members configured to couple at least some of the kinetic action to the tip device.

4. The probe device as claimed in claim 3 wherein the base member, the cantilever, and the actuator segment each comprises conductive material, wherein the first end of the actuator segment is electrically insulated from the base member;

the probe device further including an electrical conduction path through the base member, the cantilever, and the actuator segment, wherein an electric current flow along the electrical conduction path causes heating of the actuator segment thereby effecting dimensional changes of the active portion.

5. The probe as claimed in claim 3 wherein the one or more action members include a tip platform suitable for receiving a tip device, the tip platform having a flexural joint connecting it to the free end, wherein the second end of the actuator segment is attached proximate the flexural joint, so that dimensional changes in the active portion of the actuator segment result in movement of the tip platform about the flexural joint.

6. The probe device of claim 3 wherein the kinetic segment is configured to effect rotational motion of a tip device having a cylindrical shaft, the rotational motion about an axis of the cylindrical shaft, the one or more action members including:

a tip holder disposed along a portion of the cantilever and configured to receive a cylindrical shaft of a tip device; and

a drive track having a contact surface, the drive track flexibly connected to the cantilever and disposed in opposed relation to the tip holder, wherein the contact surface is in facing relation to the arcuate bearing sure,

the drive track having an end region connected to the second end of the actuator portion,

wherein first dimensional changes of the actuator portion effect linear motion of the drive track along a long axis thereof,

wherein second dimensional changes of the actuator portion effect lateral motion to position the drive track in a first position wherein the contact surface is positioned so as to be out of contact with a cylindrical shaft of a tip device received in the tip holder or in a second configuration wherein the contact surface is positioned so as to be in contact relation with a cylindrical shaft of a tip device received in the tip holder,

wherein combinations of the first dimensional changes and the second dimensional changes cooperate to produce rotational motion of a tip device received in the tip holder.

7. In a scanning probe microscope system, a probe comprising:

a base member of electrically conductive material, the base member having a cantilevered segment extending therefrom, the cantilevered segment having a free end, the free end having first and second arm segments extending therefrom;

an active platform of electrically conductive material having a first connection to the first arm segment and a second connection to the second arm segment;

an insulative layer disposed atop the base member, the cantilever segment and the first and second am segments, an exposed portion of the active platform absent the insulative layer; and

a conductive layer disposed atop the insulative layer and in electrical contact with the exposed portion of the active platform,

wherein a conduction path or a flow of electric current includes the conductive layer, the active platform, the first and second arm segments and the base member,

wherein the flow of electric current causes deformation of the first and second arm segments due to local heating thereat, the deformation causing motion in the active platform.

8. The probe of claim 7 wherein the active platform includes a tip.

9. The probe of claim 7 wherein the base layer material is a semiconductor material.

10. The probe of claim 7 wherein the conductive layer is a metallic layer.

11. A scanning microscope system comprising a controller unit, a translation unit coupled to received translation signals from the controller unit, and a probe assembly as claimed in claim 7 coupled to the translation unit, the translation unit operable to effect incremental motion in 3-dimensional space in increments of about one micron or less.