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Microelectromechanical magnetometer

  • US 7,253,616 B2
  • Filed: 10/13/2005
  • Issued: 08/07/2007
  • Est. Priority Date: 10/13/2005
  • Status: Expired due to Fees
First Claim
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1. An apparatus, comprising:

  • a substrate;

    a MEM device including a comb capacitor and a magnetic element physically connected to one electrode of said comb capacitor, said magnetic element capable of moving said one electrode in a manner that alters a capacitance of said comb capacitor; and

    at least one spring physically connecting said magnetic element to said substrate, wherein said comb capacitor comprises a fixed electrode having fixed fingers projecting from a fixed surface opposing a surface of the one electrode, said one electrode having fingers that interdigitate with said fixed fingers.

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