Microelectromechanical magnetometer
First Claim
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1. An apparatus, comprising:
- a substrate;
a MEM device including a comb capacitor and a magnetic element physically connected to one electrode of said comb capacitor, said magnetic element capable of moving said one electrode in a manner that alters a capacitance of said comb capacitor; and
at least one spring physically connecting said magnetic element to said substrate, wherein said comb capacitor comprises a fixed electrode having fixed fingers projecting from a fixed surface opposing a surface of the one electrode, said one electrode having fingers that interdigitate with said fixed fingers.
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Abstract
An apparatus comprising a substrate and a MEM device. The MEM includes a comb capacitor and a magnetic element physically connected to one electrode of the comb capacitor. The magnetic element is capable of moving the one electrode in a manner that alters a capacitance of the comb capacitor. The apparatus also includes at least one spring physically connecting the magnetic element to the substrate.
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Citations
19 Claims
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1. An apparatus, comprising:
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a substrate; a MEM device including a comb capacitor and a magnetic element physically connected to one electrode of said comb capacitor, said magnetic element capable of moving said one electrode in a manner that alters a capacitance of said comb capacitor; and at least one spring physically connecting said magnetic element to said substrate, wherein said comb capacitor comprises a fixed electrode having fixed fingers projecting from a fixed surface opposing a surface of the one electrode, said one electrode having fingers that interdigitate with said fixed fingers. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 16, 17, 18)
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9. A method of use, comprising:
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placing an apparatus in a magnetic field, where said apparatus comprises a MEM device having a comb capacitor, a magnetic element physically connected to one electrode of said comb capacitor and at least one spring physically connecting said magnetic element to a substrate of said apparatus, wherein said comb capacitor comprises a fixed electrode having fixed fingers projecting from a fixed surface opposing a surface of the one electrode, said one electrode having fingers that interdigitate with said fixed fingers; and changing said magnetic field thereby causing said magnetic element to move said one electrode in a manner that alters a capacitance of said comb capacitor. - View Dependent Claims (10, 11, 12, 13, 14, 15, 19)
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Specification