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RF MEMS switch with integrated impedance matching structure

  • US 7,253,699 B2
  • Filed: 02/24/2004
  • Issued: 08/07/2007
  • Est. Priority Date: 05/12/2003
  • Status: Expired due to Fees
First Claim
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1. An impedance matching structure for a RF MEMS switch having a closeable RF contact in a RF line, the impedance matching structure including only one protuberance or hump to increase the width of a portion of the RF line immediately adjacent the RF contact to greater than the width of a portion of the RF line removed from the RF contact, wherein the width of the RF contact where the RF contact meets the RF line is less than the width of the portion of the RF line removed from the RF contact.

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