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Polishing assembly with a window

  • US 7,255,629 B2
  • Filed: 09/15/2006
  • Issued: 08/14/2007
  • Est. Priority Date: 03/28/1995
  • Status: Expired due to Fees
First Claim
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1. A polishing assembly for a chemical mechanical polishing apparatus, comprising:

  • a platen;

    a polishing pad with a polishing surface supported on the platen, the polishing pad having an aperture therethrough; and

    a solid, substantially transparent window spanning the aperture, wherein a portion of the polishing pad extends laterally over a portion of the window.

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