Carrier head vibration damping

• US 7,255,637 B2
• Filed: 10/10/2001
• Issued: 08/14/2007
• Est. Priority Date: 09/08/2000
• Status: Expired due to Term

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Nagengast, Andrew J., Chen, Hung Chih, Bennett, Doyle E.
• Primary Examiner(s): Eley; Timothy V.
• Application Number:
  US09/975,196
• Publication Number:
  US 20020081956A1
• Time in Patent Office: 2,134 Days
• Field of Search: 451/285, 451/286, 451/287, 451/288, 451/289, 451/290, 451/397, 451/398, 451/402
• US Class Current: 451/385
• CPC Class Codes: B24B 37/30 for single side lapping of plane surfaces
• CPC Class Codes: B24B 37/32 Retaining rings

Abstract

A carrier head for chemical mechanical polishing that has a base having at least a portion formed of a polymer, a mounting assembly connected to the base having a surface for contacting a substrate, a retainer secured to the portion of the base to prevent the substrate from moving along the surface, and a dampening material secured between the retainer and the base.

Claims

1. A carrier head for chemical mechanical polishing, comprising:

a base having at least a portion formed of a polymer;

a mounting assembly connected to the base having a surface for contacting a substrate;

a retainer secured to the portion of the base to prevent the substrate from moving along the surface; and

a damping material secured between the retainer and the portion of the base to reduce the translation of vibrational energy between the retainer and the base, wherein the damping material does not rebound to its original shape after being deformed;

wherein the polymer includes polyphenylenesulfide, carbon fibers and polytetrafluoroethylene.

2. The carrier head of claim 1, wherein the portion of the base is a ring-shaped body extended around a perimeter of the base.

3. The carrier head of claim 2, wherein the ring-shaped body includes at least one boss extending to contact the retainer.

4. The carrier head of claim 3, further comprising at least one screw extending through apertures in the base, the ring-shaped body and the damping material and into a receiving recess in the retainer to secure the retainer to the base.

5. The carrier head of claim 4, wherein the at least one boss surrounds the at least one screw.

6. The carrier head of claim 2, wherein the polymer includes polyphenylenesulfide, carbon fibers and polytetrafluoroethylene.

7. The carrier head of claim 1, wherein the polymer includes about 50-55% polyphenylenesulfide, 30-35% carbon fibers, and about 10-15% polytetrafluoroethylene.

8. The carrier head of claim 1, wherein the damping material includes a polyvinylchoride thermoplastic.

9. The carrier head of claim 1, wherein the entire base is formed from the polymer.