Diffractive optical element and fabrication method thereof

• US 7,256,939 B2
• Filed: 03/29/2005
• Issued: 08/14/2007
• Est. Priority Date: 03/30/2004
• Status: Active Grant

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Tanaka, Issei
• Primary Examiner(s): AMARI, ALESSANDRO V
• Application Number:
  US11/091,412
• Publication Number:
  US 20050219698A1
• Time in Patent Office: 868 Days
• Field of Search: 359565-576, 359/742, 369/112.03
• US Class Current: 359/576
• CPC Class Codes: G02B 5/1852 using mechanical means, e.g. ruling with diamond tool, moulding
• CPC Class Codes: Y10S 359/90 Methods

Abstract

A diffractive optical element 1 comprises a first element 10 and a second element 20, whose materials are different from each other. These elements are bonded to each other, with a diffraction grating 30 created on the boundary surface between the first element 10 and the second element 20, and in the diffractive optical element 1, at least the second element 20 is made from a photo-setting resin, which is set by light rays incident through the first element 10. The diffractive optical element 1 is set in a predetermined range of values including values that make the transmittance T1 of the first element 10 and the transmittance T2 of the second element 20 equal to each other for the light rays. As a result, as differences in cure shrinkage in the second element 20 are generated by differences in the intensity of the light rays caused from ups and downs of the diffraction grating 30 created on the surface of the first element 10, the differences in cure shrinkage are controlled within a range so as not to degrade the desired performance of the diffractive optical element 1.

Claims

1. A diffractive optical element comprising a first element and a second element, whose materials are different from each other and which elements are bonded to each other, with a diffraction grating created on a boundary surface between said first element and said second element, wherein:

at least said second element is made from a photo-setting resin, which is set by light rays incident through said first element;

said diffractive optical element is set in a predetermined range of values including values that make a transmittance of said first element and a transmittance of said second element equal to each other for said light rays, so that as differences in cure shrinkage in said second element are generated by differences in intensity of said light rays caused from ups and downs of said diffraction grating created on said boundary surface of said first element, said differences in cure shrinkage are controlled within a range so as not to degrade a desired performance of said diffractive optical element; and

said diffractive element satisfies the following condition

0.990≦

(T2/T1)^H/10000)≦

1.010

where “

H”

(unit;

μ

m) represents a height of said diffraction grating, and for said second element to be cured by said light rays being transmitted through said first element, “

T1”

represents the transmittance per 10 mm through said first element and “

T2”

represents the transmittance per 10 mm through said second element.

2. The diffractive optical element set forth in claim 1, wherein said light rays that pass through said first element and cure said second element are ultraviolet rays.

3. The diffractive optical element set forth in claim 2, wherein said ultraviolet rays are i-line rays.

4. The diffractive optical element set forth in claim 3, wherein said first element is made from an ultraviolet-curable resin.

5. The diffractive optical element set forth in claim 2, wherein said first element is made from an ultraviolet-curable resin.

6. The diffractive optical element set forth in claim 1, wherein said first element is made from an ultraviolet-curable resin.

7. A diffractive optical element comprising:

a first element; and

a second element whose material is different from said first element, said first element and said second element being bonded to each other with a diffraction grating created on a boundary surface between said first element and said second element;

wherein at least said second element is made from a photo-setting resin and said second element is cured by light incident through said first element; and

said diffractive optical element satisfies the following condition

0.990≦

(T2/T1)^(H/10000)≦

1.010

where “

H”

(unit;

μ

m) represents a height of said diffraction grating, “

T1”

represents the transmittance per 10 mm through said first element for said light, and “

T2”

represents the transmittance per 10 mm through said second element for said light.

8. The diffractive optical element set forth in claim 7, wherein said light is ultraviolet rays.

9. The diffractive optical element set forth in claim 8, wherein said ultraviolet light is i-line light.

10. The diffractive optical element set forth in claim 8, wherein said first element is made from an ultraviolet-curable resin.

11. The diffractive optical element set forth in claim 7, wherein said first element is made from an ultraviolet-curable resin.