Dynamically adjusting the distribution for dispatching lot between current and downstream tool by using expertise weighting mechanism

• US 7,257,454 B2
• Filed: 11/21/2003
• Issued: 08/14/2007
• Est. Priority Date: 11/21/2003
• Status: Expired due to Fees

• Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Original Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Inventors: Chien, Wen-Chi
• Primary Examiner(s): Bahta; Kidest
• Assistant Examiner(s): SHECHTMAN, SEAN P
• Application Number:
  US10/719,721
• Publication Number:
  US 20050113955A1
• Time in Patent Office: 1,362 Days
• Field of Search: 700/9, 700/19, 700/28, 700/32, 700/83, 700 95- 97, 700 99-103, 700/105, 700/108, 700/121, 718/100, 718102-106
• US Class Current: 700/101
• CPC Class Codes: G06Q 10/06 Resources, workflows, human or project management; Enterprise or organisation planning; Enterprise or organisation modelling
• CPC Class Codes: Y02P 90/80 Management or planning

Abstract

A system and method that prioritizes product lots for fabrication and dispatching to manufacturing equipment establishes priorities for dispatching product lots based on a criticality factor and establishes a priority for dispatching product lots to manufacturing equipment based on processing capability and the efficiency of manufacturing equipment. A computer integrated manufacturing system executes a program process that functions as a lot dispatcher and a priority factor calculator. The lot dispatcher is in communication with an order entry system to receive requests for fabrication and with a process information system to receive procedures defining which manufacturing equipment is required. A manufacturing information system provides the lot dispatcher with a criticality factor and a queue level for each piece of manufacturing equipment. Then the current group of pieces of manufacturing equipment is followed with a balanced loading.

Claims

1. A system for dispatching of at least one product lot for processing to a plurality of pieces of manufacturing equipment arranged in groups within processing stages of a manufacturing line, said system comprising:

a lot dispatcher in communication with an order entry system to receive requests for fabrication of a product lot, in communication with a process information system to receive procedures defining which pieces of manufacturing equipment are required for said fabrication of said product lot, and in communication with a manufacturing information system to dynamically receive a status of said fabrication of said product lot, a criticality factor for each piece of manufacturing equipment, and a queue level for each piece of manufacturing equipment that follows a current group of pieces of manufacturing equipment required for said product lot; and

a priority factor calculator in communication with said lot dispatcher to receive a listing of said defined pieces of manufacturing equipment required for said fabrication of said product lot, said criticality factor, and said queue level, for determining a priority factor for said product lot such that each group of pieces of manufacturing equipment following said current group of pieces of manufacturing equipment has a balanced loading and said product lot is processed at an expeditious time for on-time delivery;

wherein;

if groups of first following pieces of manufacturing equipment have a criticality factor of a first level, said priority factor has a first priority level, and

if groups of first following pieces of manufacturing equipment are of a first type and if groups of second following pieces of manufacturing equipment are of a second type, said priority factor has a second priority level; and

wherein;

said priority factor calculator determines said first priority factor level by the formula;

$\mathrm{KF\_}<br><br>1=\frac{\mathrm{WIP\_c}}{\mathrm{TOOL}<br><br>\#<br><br>\mathrm{\_c}*\mathrm{PPH\_c}*\mathrm{EFF\_c}}$

where;

KF_—

1 is said first priority level for a product lot entering a group of current pieces of manufacturing equipment

WIP_c is a number of items within all product lots in a queue for the group of first following pieces of manufacturing equipment,

TOOL#_c is a number of pieces of equipment within a group of the first following pieces of manufacturing equipment;

PPH_c is an average number of items of product capable of being manufactured by said group of the first following pieces of manufacturing equipment,

EFF_c is an efficiency factor for said group of the first following pieces of manufacturing equipment.

2. The system for dispatching of claim 1 wherein if a magnitude of said first priority level achieves a threshold level, said product lot is immediately dispatched for processing.

3. The system for dispatching of claim 1 wherein if said second priority level achieves a threshold level, said product lot is immediately dispatched for processing.

4. The system for dispatching of claim 1 wherein if the group of first following pieces of manufacturing equipment has a criticality factor of a second level, said priority factor has a third priority level.

5. The system for dispatching of claim 4 wherein if said third priority level indicates that said product lot should not be immediately dispatched for processing, said product lot is placed on a queue of one of the first following pieces of manufacturing equipment.

6. The system for dispatching of claim 1 wherein if the group of first following pieces of manufacturing equipment is not of the first type, said priority factor has a fourth priority level.

7. The system for dispatching of claim 6 wherein if said fourth priority level indicates that said product lot should not be immediately dispatched for processing, said product lot is placed on one queue of one of the first following pieces of manufacturing equipment.

8. The system for dispatching of claim 1 wherein if the group of second following pieces of manufacturing equipment is not of the second type, said priority factor has a fifth priority level.

9. The system for dispatching of claim 8 wherein if said fifth priority level indicates that said product lot should not be immediately dispatched for processing, said product lot is placed on a queue of one of the first following pieces of manufacturing equipment.

10. The system for dispatching of claim 1 wherein if the group of first following pieces of manufacturing equipment is of the first type, and the group of second following pieces of manufacturing equipment is of the second type, and the group of second following pieces of manufacturing equipment has a criticality factor that is not the first level, said priority factor has a sixth priority level.

11. The system for dispatching of claim 10 wherein if said sixth priority level indicates that said product lot should not be immediately dispatched for processing, said product lot is placed on a queue of one of the first following pieces of manufacturing equipment.

12. The system for dispatching of claim 1 wherein said product lot is substrates onto which integrated circuits are fabricated.

13. The system for dispatching of claim 1 wherein said manufacturing equipment is integrated circuit processing equipment for the formation of integrated circuits upon substrates.

14. The system for dispatching of claim 13 wherein the integrated circuit processing equipment includes furnaces and substrate cleaning equipment.

15. A system for dispatching of at least one product lot for processing to a plurality of pieces of manufacturing equipment arranged in groups within processing stages of a manufacturing line, said system comprising:

a lot dispatcher in communication with an order entry system to receive requests for fabrication of a product lot, in communication with a process information system to receive procedures defining which pieces of manufacturing equipment are required for said fabrication of said product lot, and in communication with a manufacturing information system to dynamically receive a status of said fabrication of said product lot, a criticality factor for each piece of manufacturing equipment, and a queue level for each piece of manufacturing equipment that follows a current group of pieces of manufacturing equipment required for said product lot; and

a priority factor calculator in communication with said lot dispatcher to receive a listing of said defined pieces of manufacturing equipment required for said fabrication of said product lot, said criticality factor, and said queue level, for determining a priority factor for said product lot such that each group of pieces of manufacturing equipment following said current group of pieces of manufacturing equipment has a balanced loading and said product lot is processed at an expeditious time for on-time delivery;

wherein;

if groups of first following pieces of manufacturing equipment have a criticality factor of a first level, said priority factor has a first priority level, and

if groups of first following pieces of manufacturing equipment are of a first type and if groups of second following pieces of manufacturing equipment are of a second type, said priority factor has a second priority level; and

wherein;

said priority factor calculator determines said second priority level by the formula;

$\mathrm{KF\_}<br><br>2=\frac{\mathrm{WIP\_cd}+\mathrm{INPR\_cd}+\mathrm{WIP\_d}}{\mathrm{TOOL}<br><br>\#<br><br>\mathrm{\_d}*\mathrm{PPH\_d}*\mathrm{EFF\_d}}$

where;

KF_—

2 is said second priority level for a product lot entering a current group of pieces of manufacturing equipment

WIP_cd is a number of items within all product lots in queue for the group of first following pieces of manufacturing equipment and the group of second following pieces of manufacturing equipment,

INPR_cd is a number of items within all product lots in queue for the group of first following pieces of manufacturing equipment which are to proceed subsequently to the group of second following pieces of manufacturing equipment,

WIP_d is a number of items within all product lots in queue for the group of second following pieces of manufacturing equipment,

TOOL#_d is number of pieces of equipment within a group of the second following pieces of manufacturing equipment;

PPH_d is an average number of items of product capable of being manufactured by said group of the second following pieces of manufacturing equipment,

EFF_d is an efficiency factor for said group of the second following pieces of manufacturing equipment.