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Flow sensor with self-aligned flow channel

  • US 7,258,003 B2
  • Filed: 08/31/2004
  • Issued: 08/21/2007
  • Est. Priority Date: 12/07/1998
  • Status: Expired due to Term
First Claim
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1. A flow sensor comprising:

  • a substrate having a sensing element thereon, said sensing element configured to sense at least one property of a fluid;

    an alignment layer deposited on the substrate, the alignment layer defining one or more guide elements; and

    a flow channel;

    wherein the guide elements define the flow channel and align the flow channel over the sensing element.

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