Flow sensor with self-aligned flow channel
First Claim
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1. A flow sensor comprising:
- a substrate having a sensing element thereon, said sensing element configured to sense at least one property of a fluid;
an alignment layer deposited on the substrate, the alignment layer defining one or more guide elements; and
a flow channel;
wherein the guide elements define the flow channel and align the flow channel over the sensing element.
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Abstract
A flow sensor is provided having a substrate with a sensing element and flow channel aligned over the sensing element. The sensing element senses at least one property of a fluid. The flow channel is aligned by one or more guide elements formed in an alignment layer. The flow channel across the sensing area is accurately and precisely aligned due to the guide elements provided at the wafer-level, facilitating reliable, low-cost, and consistent results among multiple flow sensors. The flow sensor is adapted for use in harsh environments.
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Citations
36 Claims
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1. A flow sensor comprising:
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a substrate having a sensing element thereon, said sensing element configured to sense at least one property of a fluid; an alignment layer deposited on the substrate, the alignment layer defining one or more guide elements; and a flow channel;
wherein the guide elements define the flow channel and align the flow channel over the sensing element. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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25. A flow sensor comprising:
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a substrate having a sensing element thereon, said sensing element configured to sense at least one property of a fluid; an alignment layer deposited on the substrate, the alignment layer defining a location channel aligned over the sensing element; and a flow tube positioned within the location channel.
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26. A flow sensor comprising:
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a substrate having a sensing element thereon, said sensing element configured to sense at least one property of a fluid; a polymer structure positioned on the substrate, the polymer structure defining a location channel aligned over the sensing element; a molded structure defining a flow channel, the molded structure configured to be at least partially received within the location channel such that the flow channel is aligned over the sensing element;
wherein the molded structure defines at least a bottom of the flow channel. - View Dependent Claims (27, 28)
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29. A sensor comprising:
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sensor means for sensing at least one property of a fluid; flow channel alignment means positioned to direct fluid flow over the sensor means; flow directing means for directing fluid flow into the flow channel alignment means; and a cap positioned over the flow channel alignment means. - View Dependent Claims (30, 31, 32, 33, 34, 35)
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36. A sensor for measuring one or more physical properties of a fluid comprising:
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a sensor die made up of a substantially solid insulating sensor body and a plurality of sensing elements; a polymer substrate attached to the sensor die, the polymer substrate defining a plurality of flow channels positioned over the sensing elements; and a plurality of flow tubes in fluid communication with the flow channels.
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Specification