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Process and system for laser crystallization processing of film regions on a substrate to provide substantial uniformity, and a structure of such film regions

  • US 7,259,081 B2
  • Filed: 08/19/2003
  • Issued: 08/21/2007
  • Est. Priority Date: 08/19/2002
  • Status: Expired due to Fees
First Claim
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1. A method for processing a thin film sample, comprising the steps of:

  • (a) controlling a beam generator to emit at least one beam pulse;

    (b) with the at least one beam pulse, irradiating at least one portion of the film sample with sufficient intensity to fully melt the at least one section of the sample throughout its thickness; and

    (c) allowing the at least one portion of the film sample to re-solidify, the re-solidified at least one portion being composed of a first area and a second area, wherein, upon the re-solidification thereof, the first area includes large grains, and the second area has a small-grained region formed through nucleation,wherein the first area surrounds the second area and has a grain structure which is different from a grain structure of the second area, and wherein the second area is configured to facilitate thereon an active region of an electronic device.

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