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Method of making a microelectronic and/or optoelectronic circuitry sheet

  • US 7,259,106 B2
  • Filed: 09/09/2005
  • Issued: 08/21/2007
  • Est. Priority Date: 09/10/2004
  • Status: Expired due to Fees
First Claim
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1. A method of manufacturing an electronic or optoelectronic circuitry sheet, comprising:

  • a) forming a device layer stack having a plurality of unpatterned device layers;

    b) locating a resist layer in working relation with said device layer stack; and

    c) activating said resist layer so as to impart a plurality of images distinct from one another at different imaging levels within said resist layer, wherein said plurality of images are imparted substantially simultaneously.

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