Miniature RF and microwave components and methods for fabricating such components

• US 7,259,640 B2
• Filed: 12/03/2002
• Issued: 08/21/2007
• Est. Priority Date: 12/03/2001
• Status: Expired due to Term

• Current Assignee: Memgen Corporation (Technoprobe S.P.A.)
• Original Assignee: Microfabrica Incorporated (Technoprobe S.P.A.)
• Inventors: Smalley, Dennis R., Cohen, Adam L., Lockard, Michael S., Bang, Christopher A., Brown, Elliott R., Evans, John D., Grosser, Morton
• Primary Examiner(s): Pascal; Robert
• Assistant Examiner(s): Glenn; Kimberly E
• Application Number:
  US10/309,521
• Publication Number:
  US 20030222738A1
• Time in Patent Office: 1,722 Days
• Field of Search: 333/206, 333/208, 333/160
• US Class Current: 333/160
• CPC Class Codes: B33Y 10/00 Processes of additive manufacturing
• CPC Class Codes: B81B 2201/042 Micromirrors, not used as optical switches
• CPC Class Codes: C25D 1/003 3D structures, e.g. superposed patterned layers
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: H01P 1/202 Coaxial filters cascaded coaxial cavities H01P1/205
• CPC Class Codes: H01P 11/00 Apparatus or processes specially adapted for manufacturing waveguides or resonators, lines, or other devices of the waveguide type
• CPC Class Codes: H01P 11/005 Manufacturing coaxial lines
• CPC Class Codes: H01P 11/007 Manufacturing frequency-selective devices resonators H01P11/008
• CPC Class Codes: H01P 3/06 Coaxial lines
• CPC Class Codes: H01P 5/183 at least one of the guides being a coaxial line
• CPC Class Codes: H05K 3/4647 by applying an insulating layer around previously made via studs
• CPC Class Codes: Y10T 29/49002 Electrical device making
• CPC Class Codes: Y10T 29/49016 Antenna or wave energy "plumbing" making
• CPC Class Codes: Y10T 29/49018 with other electrical component

Abstract

RF and microwave radiation directing or controlling components are provided that may be monolithic, that may be formed from a plurality of electrodeposition operations and/or from a plurality of deposited layers of material, that may include switches, inductors, antennae, transmission lines, filters, and/or other active or passive components. Components may include non-radiation-entry and non-radiation-exit channels that are useful in separating sacrificial materials from structural materials. Preferred formation processes use electrochemical fabrication techniques (e.g. including selective depositions, bulk depositions, etching operations and planarization operations) and post-deposition processes (e.g. selective etching operations and/or back filling operations).

Claims

1. A coaxial RF or microwave component that preferentially passes a radiation in a desired frequency band, comprising:

a. at least one RF or microwave radiation entry port in a conductive structure;

b. at least one RF or microwave radiation exit port in the conductive structure;

c. at least one passage, substantially bounded on the sides by the conductive structure, through which RF or microwave radiation passes when traveling from the at least one entry port to the at least one exit port;

d. a central conductor extending along the at least one passage from the entry port to the exit port; and

e. at least one conductive spoke extending between the central conductor and the conductive structure at each of a plurality of locations where successive locations along the length of the passage are spaced by approximately one-half of a propagation wavelength, or an integral multiple thereof, within the passage for a frequency to be passed by the component,

wherein one or more of the following conditions are met (1) the central conductor, the conductive structure, and the conductive spokes are monolithic, (2) a cross-sectional dimension of the passage perpendicular to a propagation direction of the radiation along the passage is less than about 1 mm, more preferably less than about 0.5 mm, and most preferably less than about 0.25 mm, (3) more than about 50% of the passage is filled with a gaseous medium, more preferably more than about 70% of the passage is filled with a gaseous medium, and most preferably more than about 90% of the passage is filled with a gaseous medium, (4) at least a portion of the conductive portions of the component are formed by an electrodeposition process, (5) at least a portion of the conductive portions of the component are formed from a plurality of successively deposited layers, (6) at least a portion of the passage has a generally rectangular shape, (7) at least a portion of the central conductor has a generally rectangular shape, (8) the passage extends along a two-dimensional non-linear path, (9) the passage extends along a three-dimensional path, (10) the passage comprises at least one curved region and a side wall of the passage in the curved region has a nominally smaller radius than an opposite side of the passage in the curved region and is provided with a plurality of surface oscillations having smaller radii, (11) the conductive structure is provided with channels at one or more locations where the electrical field at a surface of the conductive structure, if it were there, would have been less than about 20% of its maximum value within the passage, more preferably less than 10% of its maximum value within the passage, even more preferably less than 5% of its maximum value within the passage, and most preferably where the electrical field would have been approximately zero, (12) the conductive structure is provided with patches of a different conductive material at one or more locations where the electrical field at the surface of the conductive structure, if it were there, would have been less than about 20% of its maximum value within the passage more preferably less than about 10% of its maximum value within the passage, even more preferably less than about 5% of its maximum value within the passage, and most preferably where the electrical field would have been approximately zero, (13) mitered corners are used at least some junctions for segments of the passage that meet at angles between 60° and

120°

, and/or (14) the conductive spokes are spaced at an integral multiple of one-half the wavelength and bulges on the central conductor or bulges extending from the conductive structure extend into the passage at one or more locations spaced from the conductive spokes by an integral multiple of approximately one-half the wavelength.

2. The component of claim 1 wherein condition one (1) is met and at least one other condition is met.

3. The component of claim 1 wherein condition two (2) is met and at least one other condition is met.

4. The component of claim 1 wherein condition three (3) is met and at least one other condition is met.

5. The component of claim 1 wherein condition four (4) is met and at least one other condition is met.

6. The component of claim 1 wherein condition five (5) is met and at least one other condition is met.

7. The component of claim 1 wherein condition six (6) is met and at least one other condition is met.

8. The component of claim 1 wherein condition seven (7) is met and at least one other condition is met.

9. The component of claim 1 wherein condition eight (8) is met and at least one other condition is met.

10. The component of claim 1 wherein condition nine (9) is met and at least one other condition is met.

11. The component of claim 1 wherein condition ten (10) is met and at least one other condition is met.

12. The component of claim 1 wherein condition eleven (11) is met and at least one other condition is met.

13. The component of claim 1 wherein condition twelve (12) is met and at least one other condition is met.

14. The component of claim 1 wherein condition thirteen (13) is met and at least one other condition is met.

15. The component of claim 1 wherein condition fourteen (14) is met and at least one other condition is met.

16. The component of claim 1 wherein the conductive structure, the central conductor, or the spokes comprise a metal.

17. The component of claim 1 wherein the surface of at least one of the conductive structure or the central conductor comprises a more conductive metal plated above a less conductive material.

18. The component of claim 1 wherein the passage is substantially filled with a solid dielectric material.

19. The component of claim 1 wherein the desired frequency band is centered on a frequency greater than about 2 GHz, more preferably greater than about 10 GHz, and even more preferably greater about 20 GHz.

20. The component of claim 1 wherein the at least one spoke comprises one of (1) at least three sets of two spokes, more preferably at least four sets of two spokes, and most preferably at least five sets of two spokes, or (2) at least three sets of four spokes, more preferably at least four sets of four spokes, and most preferably at least five sets of four spokes.

21. A coaxial RF or microwave component that preferentially passes a radiation in a desired frequency band, comprising:

a. at least one RF or microwave radiation entry port in a conductive structure;

b. at least one RF or microwave radiation exit port in the conductive structure;

c. at least one passage, substantially bounded on the sides by the conductive structure, through which RF or microwave radiation passes when traveling from the at least one entry port to the at least one exit port;

d. a central conductor extending along the at least one passage from the entry port to the exit port; and

e. at a plurality of locations along a length of the passage, a pair of conductive stubs extending from approximately the same position along a length of the passage, one having an inductive property and the other having a capacitive property, each extending into a closed channel that extends from a side of the passage, wherein the successive locations along the length of the passage are spaced by approximately one-quarter of a propagation wavelength, or an integral multiple thereof, within the passage for a frequency to be passed by the component,

wherein one or more of the following conditions are met (1) the central conductor, the conductive structure, and the conductive stubs are monolithic, (2) a cross-sectional dimension of the passage perpendicular to a propagation direction of the radiation along the passage is less than about 1 mm, (3) more than about 50% of the passage is filled with a gaseous medium (4) at least a portion of the conductive portions of the component are formed by an electrodeposition process, (5) at least a portion of the conductive portions of the component are formed from a plurality of successively deposited layers, (6) the passage comprises at least one curved region and a side wall of the passage in the curved region has a nominally smaller radius than an opposite side of the passage in the curved region and is provided with a plurality of surface oscillations having smaller radii, (7) the conductive structure is provided with channels at one or more locations where the electrical field at a surface of the conductive structure, if it were there, would have been less than about 20% of its maximum value within the passage (8) the conductive structure is provided with patches of a different conductive material at one or more locations where the electrical field at the surface of the conductive structure, if it were there, would have been less than about 20% of its maximum value within the passage, (9) mitered corners are used at at least some junctions for segments of the passage that meet at angles between 60° and

120°

, and/or (10) the conductive stubs are spaced at an integral multiple of one-quarter the wavelength and bulges on the central conductor or bulges extending from the conductive structure extend into the passage at one or more locations spaced from the conductive stubs by an integral multiple of approximately one-half the wavelength.

22. The component of claim 21 wherein condition one (1) is met and at least one other condition is met.

23. The component of claim 21 wherein condition two (2) is met and at least one other condition is met.

24. The component of claim 21 wherein condition three (3) is met and at least one other condition is met.

25. The component of claim 21 wherein condition four (4) is met and at least one other condition is met.

26. The component of claim 21 wherein condition five (5) is met and at least one other condition is met.

27. The component of claim 21 wherein at least a portion of the passage has a generally rectangular shape.

28. The component of claim 21 wherein at least a portion of the central conductor has a generally rectangular shape.

29. The component of claim 21 wherein the passage extends along a two-dimensional non-linear path.

30. The component of claim 21 wherein the passage extends along a three-dimensional path.

31. The component of claim 21 wherein condition six (6) is met and at least one other condition is met.

32. The component of claim 21 wherein condition seven (7) is met and at least one other condition is met.

33. The component of claim 21 wherein condition eight (8) is met and at least one other condition is met.

34. The component of claim 21 wherein condition nine (9) is met and at least one other condition is met.

35. The component of claim 21 wherein condition ten (10) is met and at least one other condition is met.

36. The component of claim 21 wherein the conductive structure, the central conductor, or the stubs comprise a metal.

37. The component of claim 21 wherein a cross-sectional dimension of the passage perpendicular to a propagation direction of the radiation along the passage is less than about 0.5 mm.

38. The component of claim 21 wherein more than about 70% of the passage is filled with a gaseous medium.

39. The component of claim 21 wherein the conductive structure is provided with channels at one or more locations where the electrical field at a surface of the conductive structure, if it were there, would have been less than about 10% of its maximum value within the passage.

40. The component of claim 21 wherein the conductive structure is provided with patches of a different conductive material at one or more locations where the electrical field at the surface of the conductive structure, if it were there, would have been less than about 10% of its maximum value within the passage.

41. The component of claim 21 wherein a cross-sectional dimension of the passage perpendicular to a propagation direction of the radiation along the passage is less than about 0.5 mm.

42. The component of claim 21 wherein more than about 70% of the passage is filled with a gaseous medium.

43. The component of claim 21 wherein the conductive structure is provided with channels at one or more locations where the electrical field at a surface of the conductive structure, if it were there, would have been less than about 10% of its maximum value within the passage.

44. The component of claim 21 wherein the conductive structure is provided with patches of a different conductive material at one or more locations where the electrical field at the surface of the conductive structure, if it were there, would have been less than about 10% of its maximum value within the passage.

45. A coaxial RF or microwave component that preferentially passes a radiation in a desired frequency band, comprising:

a. at least one RF or microwave radiation entry port in a conductive structure;

b. at least one RF or microwave radiation exit port in the conductive structure;

c. at least one passage, substantially bounded on the sides by the conductive structure, through which RF or microwave radiation passes when traveling from the at least one entry port to the at least one exit port;

d. a central conductor extending along the at least one passage from the entry port to the exit port; and

e. at a plurality of locations along a length of the passage, a pair of conductive stubs extending from approximately the same position along a length of the passage, one having an inductive property and the other having a capacitive property, each extending into a closed channel that extends from a side of the passage, wherein the successive locations along the length of the passage are spaced by approximately one-quarter of a propagation wavelength, or an integral multiple thereof, within the passage for a frequency to be passed by the component,

wherein one or more of the following conditions are met (1) the central conductor, the conductive structure, and the conductive stubs are monolithic, (2) a cross-sectional dimension of the passage perpendicular to a propagation direction of the radiation along the passage is less than about 1 mm, (3) more than about 50% of the passage is filled with a gaseous medium (4) at least a portion of the conductive portions of the component are formed by an electrodeposition process, (5) at least a portion of the conductive portions of the component are formed from a plurality of successively deposited layers, (6) at least a portion of the passage has a generally rectangular shape, (7) at least a portion of the central conductor has a generally rectangular shape, (8) the passage extends along a two-dimensional non-linear path, (9) the passage extends along a three-dimensional path, (10) the passage comprises at least one curved region and a side wall of the passage in the curved region has a nominally smaller radius than an oppositeside of the passage in the curved region and is provided with a plurality of surface oscillations having smaller radii, (11) the conductive structure is provided with channels at one or more locations where the electrical field at a surface of the conductive structure, if it were there, would have been less than about 20% of its maximum value within the passage (12) the conductive structure is provided with patches of a different conductive material at one or more locations where the electrical field atthe surface of the conductive structure, if it were there, would have been less than about 20% of its maximum value within the passage, (13) mitered corners are used at at least some junctions for segments of the passage that meet at angles between 60° and

120°

, and/or (14) the conductive stubs are spaced at an integral multiple of one-quarter the wavelength and bulges on the central conductor or bulges extending from the conductive structure extend into the passage at one or more locations spaced from the conductive stubs by an integral multiple of approximately one-half the wavelength, and

wherein the surface of at least one of the conductive structure or the central conductor comprises a more conductive metal plated above a less conductive material.

46. A coaxial RF or microwave component that preferentially passes a radiation in a desired frequency band, comprising:

a. at least one RF or microwave radiation entry port in a conductive structure;

b. at least one RF or microwave radiation exit port in the conductive structure;

c. at least one passage, substantially bounded on the sides by the conductive structure, through which RF or microwave radiation passes when traveling from the at least one entry port to the at least one exit port;

d. a central conductor extending along the at least one passage from the entry port to the exit port; and

e. at a plurality of locations along a length of the passage, a pair of conductive stubs extending from approximately the same position along a length of the passage, one having an inductive property and the other having a capacitive property, each extending into a closed channel that extends from a side of the passage, wherein the successive locations along the length of the passage are spaced by approximately one-quarter of a propagation wavelength, or an integral multiple thereof, within the passage for a frequency to be passed by the component,

wherein one or more of the following conditions are met (1) the central conductor, the conductive structure, and the conductive stubs are monolithic, (2) a cross-sectional dimension of the passage perpendicular to a propagation direction of the radiation along the passage is less than about 1 mm, (3) more than about 50% of the passage is filled with a gaseous medium (4) at least a portion of the conductive portions of the component are formed by an electrodeposition process, (5) at least a portion of the conductive portions of the component are formed from a plurality of successively deposited layers, (6) at least a portion of the passage has a generally rectangular shape, (7) at least a portion of the central conductor has a generally rectangular shape, (8) the passage extends along a two-dimensional non-linear path, (9) the passage extends along a three-dimensional path, (10) the passage comprises at least one curved region and a side wall of the passage in the curved region has a nominally smaller radius than an opposite side of the passage in the curved region and is provided with a plurality of surface oscillations having smaller radii, (11) the conductive structure is provided with channels at one or more locations where the electrical field at a surface of the conductive structure, if it were there, would have been less than about 20% of its maximum value within the passage (12) the conductive structure is provided with patches ofa different conductive material at one or more locations where the electrical field atthe surface of the conductive structure, if it were there, would have been less than about 20% of its maximum value within the passage, (13) mitered corners are used at at least some junctions for segments of the passage that meet at angles between 60° and

120°

, and/or (14) the conductive stubs are spaced at an integral multiple of one-quarter the, wavelength and bulges on the central conductor or bulges extending from the conductive structure extend into the passage at one or more locations spaced from the conductive stubs by an integral multiple of approximately one-half the wavelength, and

wherein the desired frequency band is centered around a frequency greater than about 2 GHz, more preferably greater than about 10 GHz, and even more preferably greater about 20 GHz.

47. A coaxial RF or microwave component that preferentially passes a radiation in a desired frequency band, comprising:

a. at least one RF or microwave radiation entry port in a conductive structure;

b. at least one RF or microwave radiation exit port in the conductive structure;

c. at least one passage, substantially bounded on the sides by the conductive structure, through which RF or microwave radiation passes when traveling from the at least one entry port to the at least one exit port;

d. a central conductor extending along the at least one passage from the entry port to the exit port; and

e. at a plurality of locations along a length of the passage, a pair of conductive stubs extending from approximately the same position along a length of the passage, one having an inductive property and the other having a capacitive property, each extending into a closed channel that extends from a side of the passage, wherein the successive locations along the length of the passage are spaced by approximately one-quarter of a propagation wavelength, or an integral multiple thereof, within the passage for a frequency to be passed bythe component,

wherein one or more of the following conditions are met (1) the central conductor, the conductive structure, and the conductive stubs are monolithic, (2) a cross-sectional dimension of the passage perpendicular to a propagation direction of the radiation along the passage is less than about 1 mm, (3) more than about 50% of the passage is filled with a gaseous medium (4) at least a portion of the conductive portions of the component are formed by an electrodeposition process, (5) at least a portion of the conductive portions of the component are formed from a plurality of successively deposited layers, (6) at least a portion of the passage has a generally rectangular shape, (7) at least a portion of the central conductor has a generally rectangular shape, (8) the passage extends along a two-dimensional non-linear path, (9) the passage extends along a three-dimensional path, (10) the passage comprises at least one curved region and a side wall of the passage in the curved region has a nominally smaller radius than an opposite side of the passage in the curved region and is provided with a plurality of surface oscillations having smaller radii, (11) the conductive structure is provided with channels at one or more locations where the electrical field at a surface of the conductive structure, if it were there, would have been less than about 20% of its maximum value, within the passage (12) the conductive structure is provided with patches of a different conductive material at one or more locations where the electrical field at the surface of the conductive structure, if it were there, would have been less than about 20% of its maximum value within the passage, (13) mitered corners are used at at least some junctions for segments of the passage that meet at angles between 60° and

120°

, and/or (14) the conductive stubs are spaced at an integral multiple of one-quarter the wavelength and bulges on the central conductor or bulges extending from the conductive structure extend into the passage at one or more locations spaced from the conductive stubs by an integral multiple of approximately one-half the wavelength, and

wherein the at least one pair of stubs comprises one stub having a length greater than about one-quarter the wavelength and a second stub having a length less than about one-quarter the wavelength, and the component includes at least three pairs of stubs, more preferably at least four pairs stubs, and most preferably at least five pairs of stubs.

48. An RF or microwave component that guides or controls radiation, comprising:

a. at least one RF or microwave energy entry port in a conductive metal structure; and

b. at least one passage substantially bounded on the sides by the conductive metal structure through which RF or microwave energy passes when traveling from the at least one entry port;

wherein at least a portion of the conductive metal structure comprises a metal and wherein the conductive metal structure is fabricated from a plurality of successively deposited layers, using one or more of the following operations;

i. forming at least one of the plurality of layers by selectively electrodepositing a first conductive material and electrodepositing a second conductive material, wherein one of the first or second conductive materials is a sacrificial material and the other is a structural material which comprises the metal, and wherein after formation of the plurality of layers the sacrificial material is removed;

ii. forming at least one of the plurality of layers by electrodepositing a first conductive material, selectively etching the first conductive material to create at least one void, and electrodepositing a second conductive material to fill the at least one void, wherein one of the first or second conducitve materials comprises the metal and the other of the first or second materials comprises a sacrificial material, and wherein after formation of the plurality of layers the sacrificial material is removed; and

/or

iv. forming at least one of the plurality of layers by selectively electrodepositing a first conductive material, then electrodepositing a second conductive material, then selectivelyetching one of the first or second conductive materials, and then electrodepositing a third conductive material, wherein at least one of the first, second, or third conductive materials is a sacrificial material and at least one of the remaining two conductive materials is a structural material comprising the metal, and wherein after formation of the plurality of layers the sacrificial material is removed.

49. The component of claim 48 additionally comprising at least one RF or microwave energy exit port in the conductive metal structure.

50. The component of claims 48 wherein one or more of the following conditions are met:

(1) a cross-sectional dimension of the passage perpendicular to a propagation direction of the radiation along the passage is less than about 1 mm, more preferably less than about 0.5 mm, and most preferably less than about 0.25 mm, (2) more than about 50% of the passage is filled with a gaseous medium, more preferably more than about 70% of the passage is filled with a gaseous medium, and most preferably more than about 90% of the passage is filled with a gaseous medium, (3) at least a portion of the passage has a generally rectangular shape, (4) at least a portion of the central conductor has a generally rectangular shape, (5) the passage extends along a two-dimensional non-linear path, (6) the passage extends along a three-dimensional path, (7) the passage comprises at least one curved region and a side wall of the passage in the curved region has a nominally smaller radius than an opposite side of the passage in the curved region and is provided with a plurality of surface oscillations having smaller radii, (8) the conductive structure is provided with channels at one or more locations where the electrical field at a surface of the conductive structure, if it were there, would have been less than about 20% of its maximum value within the passage, more preferably less than 10% of its maximum value within the passage, even more preferably less than 5% of its maximum value within the passage, and most preferably where the electrical field would have been approximately zero, (9) theconductive structure is provided with patches of a different conductive material at one or more locations where the electrical field at the surface of the conductive structure, if it were there, would have been less than about 20% of its maximum value within the passage more preferably less than about 10% of its maximum value within the passage, even more preferably less than about 5% of its maximum value within the passage, and most preferably where the electrical field would have been approximately zero, (10) mitered corners are used at least some junctions for segments of the passage that meet at angles between 60° and

120°

, and/or (11) the conductive stubs are spaced at an integral multiple of one-quarter the wavelength and bulges on the central conductor or bulges extending from the conductive structure extend into the passage at one or more locations spaced from the conductive stubs by an integral multiple of approximately one-half the wavelength, (12) the conductive structure is monolithic.

51. The component of claim 48 additionally comprising a magnetic material located within the conductive structure.

52. The component of claim 51 wherein the magnetic material comprises a magnetic material in a solidified dielectric binder.

53. The component of claim 51 wherein the binder is a polymerized material.

54. The component of claim 51 wherein the magnetic material comprises a sintered magnetic material.

55. The component of claim 51 wherein the component comprises one or more of an isolator, a circulator, a phase shifter, a tunable filter, or a switch.

56. The component of claims 48 additionally comprising an RF or microwave absorptive material comprised of a particulate conductive material embedded in a solidified dielectric binder.

57. The component of claim 48 additionally comprising an RF or microwave absorptive material comprised of a particulate conductive material embedded in a solidified dielectric binder wherein the particulate conductive material comprises carbon.

58. The component of claim 48 wherein the at least one passage extends along a three-dimensional path.

59. The component of claim 58 wherein the three-dimensional path comprises a three-dimensional spiral.

60. The component claim 48, a wherein the component comprises one or more of a low pass filter, a high pass filter, a band pass filter, a reflection base filter, an absorption based filter, a leaky wall filter, a delay line, an impedance matching structure for connecting other functional components, an antennae, a feedhorn, a directional coupler, or a combiner (e.g. a quadrature hybrid, a hybrid ring, a Wilkinson combiner, a magic T).

61. The component of claim 48, wherein the component comprises one or more of a microminiature coaxial component, a transmission line, a low pass filter, a high pass filter, a band pass filter, a reflection-based filter, an absorption-based filter, a leaky wall filter, a delay line, an impedance matching structure for connecting other functional components, a directional coupler, a power combiner (e.g., Wilkinson), a power splitter, a hybrid combiner, a magic TEE, a frequency multiplexer, or a frequency demultiplexer, a pyramidal (smooth wall) feedhorn antenna, and/or a scalar (corrugated wall) feedhorn antenna.

62. An RF or microwave component that guides or controls radiation, comprising:

a. at least one RF or microwave energy entry port in a conductive metal structure; and

b. at least one passage substantially bounded on the sides by the conductive metal structure through which RF or microwave energy passes when traveling from the at least one entry port;

wherein at least a portion of the conductive metal structure comprises a metal,

wherein forming of the conductive metal structure comprises forming a plurality of successively deposited layers where each layer comprises at least one structural material, which comprises the metal, and at least one sacrificial material, and

wherein the forming of the conductive metal structure comprises one or more of the following operations;

a. separating at least one sacrificial material from at least one structural material;

b. separating a first sacrificial material from a second sacrificial material and from the metal to create a void, then filling at least a portion of the void with a dielectric material, and thereafter separating the second sacrificial material from the metal and from the dielectric material; and

/or

c. filling a void in the metal with a magnetic or conductive material embedded in a flowable dielectric material and thereafter solidifying the dielectric material.

63. An electrical device, comprising a plurality of layers of successively deposited material, wherein the pattern resulting from the depositions provide at least one structure that is usable as an electrical device and wherein the device comprises an RF switch wherein a control electrode for the switch is at a different elevation than either contact element of the switch.

64. A microtoroidal inductor comprising a plurality of conductive loop elements configured to form at least a portion of a toroidal pattern wherein the toroidal pattern may be construed to have an inner diameter and an outer diameter and wherein at least a portion of the plurality of loops have a larger cross-sectional dimension in proximity to the outer diameter than in proximity to the inner diameter.