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Liquid crystal display apparatus having insulated reflective layer and manufacturing method thereof

  • US 7,259,813 B2
  • Filed: 12/27/2002
  • Issued: 08/21/2007
  • Est. Priority Date: 12/28/2001
  • Status: Expired due to Fees
First Claim
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1. A display apparatus configured by sandwiching a liquid crystal layer between a first substrate having a first electrode and a second substrate having a second electrode, whereinsaid first substrate further comprises:

  • a switching element provided to each pixel and including a thin film transistor in which a gate is formed above an active layer;

    a gate insulating film including a silicon oxide and formed between said gate and said active layer of said thin film transistor;

    an interlayer insulating flm formed covering said gate and said gate insulating film;

    a reflective layer formed above said interlayer insulating film so as to be insulated from said active layer of said film transistor, said reflective layer reflecting light incident from a side of said second substrate and said second electrode, both of which are transparent, into said liquid crystal layer, anda passivation film formed covering said reflective layer, and whereinsaid first electrode made of a transparent conductive material is electrically and directly connected to said active layer via a contact hole formed by opening a hole through at least said gate insulating film, said interlayer insulating film, and said passivation film which are formed between said first electrode and said active layer;

    said passivation film has endurance to a slight etching material which exposes a surface of said active layer made of silicon at a bottom of said contact hole; and

    said passivation film is made of a silicon oxide.

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