Liquid crystal display apparatus having insulated reflective layer and manufacturing method thereof
First Claim
1. A display apparatus configured by sandwiching a liquid crystal layer between a first substrate having a first electrode and a second substrate having a second electrode, whereinsaid first substrate further comprises:
- a switching element provided to each pixel and including a thin film transistor in which a gate is formed above an active layer;
a gate insulating film including a silicon oxide and formed between said gate and said active layer of said thin film transistor;
an interlayer insulating flm formed covering said gate and said gate insulating film;
a reflective layer formed above said interlayer insulating film so as to be insulated from said active layer of said film transistor, said reflective layer reflecting light incident from a side of said second substrate and said second electrode, both of which are transparent, into said liquid crystal layer, anda passivation film formed covering said reflective layer, and whereinsaid first electrode made of a transparent conductive material is electrically and directly connected to said active layer via a contact hole formed by opening a hole through at least said gate insulating film, said interlayer insulating film, and said passivation film which are formed between said first electrode and said active layer;
said passivation film has endurance to a slight etching material which exposes a surface of said active layer made of silicon at a bottom of said contact hole; and
said passivation film is made of a silicon oxide.
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Accused Products
Abstract
On a first substrate are formed a TFT provided to each pixel, an insulating film which covers the TFT, and a reflective layer which is provided on the insulating film so as to be insulated from the TFT and reflects light incident from a second substrate side. The reflective layer is covered with a passivation film on which a first electrode made of a transparent conductive material, such as ITO having the work function equivalent to a second electrode, is formed and connected to the TFT. The passivation film covering the reflective layer prevents the reflective surface of the reflective layer from deteriorating in reflection properties during a process for connecting the TFT and the first electrode. Further, the first and second electrodes having similar characteristics can symmetrically AC drive the liquid crystal layer.
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Citations
16 Claims
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1. A display apparatus configured by sandwiching a liquid crystal layer between a first substrate having a first electrode and a second substrate having a second electrode, wherein
said first substrate further comprises: -
a switching element provided to each pixel and including a thin film transistor in which a gate is formed above an active layer; a gate insulating film including a silicon oxide and formed between said gate and said active layer of said thin film transistor; an interlayer insulating flm formed covering said gate and said gate insulating film; a reflective layer formed above said interlayer insulating film so as to be insulated from said active layer of said film transistor, said reflective layer reflecting light incident from a side of said second substrate and said second electrode, both of which are transparent, into said liquid crystal layer, and a passivation film formed covering said reflective layer, and wherein said first electrode made of a transparent conductive material is electrically and directly connected to said active layer via a contact hole formed by opening a hole through at least said gate insulating film, said interlayer insulating film, and said passivation film which are formed between said first electrode and said active layer; said passivation film has endurance to a slight etching material which exposes a surface of said active layer made of silicon at a bottom of said contact hole; and said passivation film is made of a silicon oxide. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A liquid crystal apparatus configured by sandwiching a liquid crystal layer between a first substrate having a first electrode and a second substrate having a second electrode, wherein
said first substrate further comprises: -
a switching element provided to each pixel and including a thin film transistor in which a gate is formed above an active layer; a gate insulating film formed between said gate and said active layer of said thin film transistor; an interlayer insulating layer formed covering said gate and said gate insulating film; a first opening formed through said gate insulating film and said interlayer insulating film; a planarizing insulating layer formed covering said interlayer insulating film; a reflective layer formed above said planarizing insulating layer, selectively removed at a formation region of said first opening, and insulated from said active layer, said reflective layer reflecting light incident from a side of said second substrate and said second electrode, both of which are transparent, into said liquid crystal layer; a second opening formed through said planarizing insulating layer at said formation region of said first opening; and a passivation film formed covering said reflective layer, and wherein a third opening is formed through said passivation film at a position overlapping said formation region of said first opening and a formation region of said second opening, said third opening having a smaller size than a size of said first opening and a size of said second opening; said passivation film covers an inner wall of said contact hole including inner walls of said first opening and said second opening; and said passivation film is made of a silicon oxide. - View Dependent Claims (15, 16)
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Specification