Liquid cell and passivated probe for atomic force microscopy and chemical sensing
First Claim
1. A method of sensing a target species with a cell, comprising:
- providing a cell comprising a cantilevered probe coupled to an internal cavity of the cell;
driving the cantilevered probe with an excitation voltage, wherein the excitation voltage is applied to a piezoelectric element on the cantilevered probe through at least one conductive feedthrough connected between the internal cavity and an outer surface of the cell;
measuring a first deflection amplitude of the cantilevered probe with the piezoelectric element;
exposing a treated section of the cantilevered probe to a target species;
measuring a second deflection amplitude of the cantilevered probe; and
determining the target species based on the first deflection amplitude and the second deflection amplitude.
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Abstract
The invention provides a liquid cell for an atomic force microscope. The liquid cell includes a liquid cell housing with an internal cavity to contain a fluid, a plurality of conductive feedthroughs traversing the liquid cell housing between the internal cavity and a dry side of the liquid cell, a cantilevered probe coupled to the liquid cell housing, and a piezoelectric drive element disposed on the cantilevered probe. The cantilevered probe is actuated when a drive voltage is applied to the piezoelectric drive element through at least one of the conductive feedthroughs. A method of imaging an object in a liquid medium and a method of sensing a target species with the liquid cell are also disclosed.
165 Citations
17 Claims
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1. A method of sensing a target species with a cell, comprising:
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providing a cell comprising a cantilevered probe coupled to an internal cavity of the cell; driving the cantilevered probe with an excitation voltage, wherein the excitation voltage is applied to a piezoelectric element on the cantilevered probe through at least one conductive feedthrough connected between the internal cavity and an outer surface of the cell; measuring a first deflection amplitude of the cantilevered probe with the piezoelectric element; exposing a treated section of the cantilevered probe to a target species; measuring a second deflection amplitude of the cantilevered probe; and determining the target species based on the first deflection amplitude and the second deflection amplitude. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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Specification