Rotation-rate sensor
First Claim
1. A micromechanical rotation-rate sensor comprising:
- a substrate;
an anchoring device provided on the substrate;
a first spiral spring device and a second spiral spring device, wherein the two spiral spring devices are provided next to one another in mirror symmetry along their greatest extension, and wherein the two spiral spring devices together form one spiral spring apparatus; and
a centrifugal mass connected to the anchoring device via the first and second spiral spring devices connected to the centrifugal mass so that the centrifugal mass is elastically deflectable from its neutral position, about a rotational axis situated perpendicularly to a substrate surface and so that it is capable of rotary oscillation;
wherein the first spiral spring device includes a first bend at its anchoring region with the anchoring device, the second spiral spring device includes a second bend at its anchoring region with the anchoring device, the first bend bending away from the first and second spiral spring devices towards a first portion of the anchoring region, the second bend bending away from the first and second spiral spring devices towards a second portion of the anchoring region.
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Abstract
A micromechanical rotation-rate sensor includes a substrate, an anchoring device provided on the substrate, as well as a first spiral spring device and a second spiral spring device, the two spiral spring devices being provided next to one another in mirror symmetry along their greatest extension, and the two spiral spring devices together form one spiral spring apparatus. The sensor further includes a centrifugal mass connected to the anchoring device via the first spiral spring device connected to the centrifugal mass so that the centrifugal mass is elastically deflectable from its neutral position, about a rotational axis situated perpendicularly to a substrate surface, so that the centrifugal mass is capable of rotary oscillation. In addition, the first spiral spring device includes a bend at its anchoring region with the anchoring device.
18 Citations
10 Claims
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1. A micromechanical rotation-rate sensor comprising:
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a substrate; an anchoring device provided on the substrate; a first spiral spring device and a second spiral spring device, wherein the two spiral spring devices are provided next to one another in mirror symmetry along their greatest extension, and wherein the two spiral spring devices together form one spiral spring apparatus; and a centrifugal mass connected to the anchoring device via the first and second spiral spring devices connected to the centrifugal mass so that the centrifugal mass is elastically deflectable from its neutral position, about a rotational axis situated perpendicularly to a substrate surface and so that it is capable of rotary oscillation; wherein the first spiral spring device includes a first bend at its anchoring region with the anchoring device, the second spiral spring device includes a second bend at its anchoring region with the anchoring device, the first bend bending away from the first and second spiral spring devices towards a first portion of the anchoring region, the second bend bending away from the first and second spiral spring devices towards a second portion of the anchoring region. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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Specification