Pressure sensor with low sensitivity to acceleration forces
First Claim
1. A pressure sensor for sensing a fluid pressure, the pressure sensor comprising:
- a flexible membrane housed such that it separates fluid at the pressure to be sensed and fluid at a reference pressure; and
,associated circuitry for converting any deflection of the flexible membrane into an output signal indicative of the pressure to be sensed;
wherein,the flexible membrane is less than 0.1 grams.
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Accused Products
Abstract
A pressure sensor (30) for harsh environments such as vehicle tires, the sensor having a chamber (58) partially defined by a flexible membrane (50), the chamber containing a fluid at a reference pressure. In use, the flexible membrane (50) deflects due to pressure differentials between the reference pressure and the fluid pressure, so that, associated circuitry (34) can convert the deflection of the flexible membrane (50) into an output signal indicative of the fluid pressure. The sensor is a MEMS device whereby the recess, the flexible membrane and the associated circuitry are formed using lithographically masked etching and deposition techniques. MEMS fabrication techniques can produce the sensor in such high volumes that the unit cost of each sensor is very low. The MEMS sensor is so small that it can be installed in very restricted areas such as the stem of the tire valve.
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Citations
20 Claims
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1. A pressure sensor for sensing a fluid pressure, the pressure sensor comprising:
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a flexible membrane housed such that it separates fluid at the pressure to be sensed and fluid at a reference pressure; and
,associated circuitry for converting any deflection of the flexible membrane into an output signal indicative of the pressure to be sensed;
wherein,the flexible membrane is less than 0.1 grams. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification