Micro-oscillation element incorporating springs

• US 7,262,541 B2
• Filed: 03/04/2004
• Issued: 08/28/2007
• Est. Priority Date: 08/12/2003
• Status: Expired due to Fees

• Current Assignee: Fujitsu Limited
• Original Assignee: Fujitsu Limited
• Inventors: Tsuboi, Osamu, Soneda, Hiromitsu, Okuda, Hisao, Ueda, Satoshi, Sawaki, Ippei, Kouma, Norinao, Nakamura, Yoshitaka, Xiaoyu, Mi
• Primary Examiner(s): TAMAI, KARL I
• Application Number:
  US10/791,787
• Publication Number:
  US 20050046504A1
• Time in Patent Office: 1,272 Days
• Field of Search: 310/309, 359223-226, 359/290, 359/291
• US Class Current: 310/309
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means

Abstract

A micro-oscillation element includes an oscillation section and a frame. The oscillation section is provided with a mirror surface and is connected to the frame via trapezoidal first and second springs. The oscillation section is located between the first spring and the second spring. Each of the first spring and the second spring is deformable along with the oscillation of the oscillation section.

Claims

1. A micro-oscillation element comprising:

an oscillation section;

a main frame;

at least one torsion bar connecting the oscillation section to the main frame for defining an oscillation axis about which the oscillation section pivotally oscillates relative to the main frame; and

a first spring and a second spring that cause the oscillation section to be supported by the frame;

wherein the oscillation section is located between the first spring and the second spring, each of the first spring and the second spring being deformable in response to oscillation of the oscillation section about the oscillation axis;

wherein the torsion bar is connected to a first portion of the oscillation section at which the oscillation axis passes, each of the first and second springs being connected to a second portion of the oscillation section that is located away from the oscillation axis; and

wherein each of the first and second springs has width which is largest at a portion for connection to the frame and progressively decreases toward the oscillation section.

2. The micro-oscillation element according to claim 1, wherein the first and the second springs are plate springs.

3. The micro-oscillation element according to claim 1, wherein the torsion bar has a cross-shape in a cross-section orthogonal to the oscillation axis.

4. The micro-oscillation element according to claim 1, wherein at least one of the first spring, the second spring and the torsion bar is formed with at least one hole.

5. The micro-oscillation element according to claim 1, wherein at least one of the first spring, the second spring and the torsion bar has a nonconstant width.

6. The micro-oscillation element according to claim 1, wherein at least one of the first spring, the second spring and the torsion bar has a nonconstant thickness.

7. The micro-oscillation element according to claim 1, further comprising an actuator for generating a driving force causing oscillation of the oscillation section.

8. The micro-oscillation element according to claim 7, wherein a difference between a frequency of the driving force generated by the actuator and a resonance frequency of the oscillation of the oscillation section is 1% or less of the resonance frequency.

9. The micro-oscillation element according to claim 1, wherein the oscillation section is provided with a mirror face for reflecting light.

10. The micro-oscillation element according to claim 1, further comprising:

a second frame disposed outward of the main frame; and

third and fourth springs connecting the second frame to the main frame;

wherein the main frame is located between the third spring and the fourth spring, each of the third and the fourth springs being deformable along with oscillation of the main frame.

11. The micro-oscillation element according to claim 10, wherein a direction in which the first and the second springs are spaced from each other intersects a direction in which the third and the fourth springs are spaced from each other.

12. The micro-oscillation element according to claim 11, further comprising:

at least one torsion bar defining a second oscillation axis about which the main frame oscillates relative to the second frame.

13. The micro-oscillation element according to claim 12, wherein the second oscillation axis intersects the oscillation axis of the oscillation section.

14. The micro-oscillation element according to claim 13, wherein the second oscillation axis intersects the oscillation axis of the oscillation section at 90°

.

15. The micro-oscillation element according to claim 1, wherein each of the first and second springs has thickness which is larger at portions for connection to the frame and the oscillation section, respectively, while being smaller at an intermediate portion between the frame and the oscillation section.