Micro-oscillation element incorporating springs
First Claim
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1. A micro-oscillation element comprising:
- an oscillation section;
a main frame;
at least one torsion bar connecting the oscillation section to the main frame for defining an oscillation axis about which the oscillation section pivotally oscillates relative to the main frame; and
a first spring and a second spring that cause the oscillation section to be supported by the frame;
wherein the oscillation section is located between the first spring and the second spring, each of the first spring and the second spring being deformable in response to oscillation of the oscillation section about the oscillation axis;
wherein the torsion bar is connected to a first portion of the oscillation section at which the oscillation axis passes, each of the first and second springs being connected to a second portion of the oscillation section that is located away from the oscillation axis; and
wherein each of the first and second springs has width which is largest at a portion for connection to the frame and progressively decreases toward the oscillation section.
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Abstract
A micro-oscillation element includes an oscillation section and a frame. The oscillation section is provided with a mirror surface and is connected to the frame via trapezoidal first and second springs. The oscillation section is located between the first spring and the second spring. Each of the first spring and the second spring is deformable along with the oscillation of the oscillation section.
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Citations
15 Claims
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1. A micro-oscillation element comprising:
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an oscillation section; a main frame; at least one torsion bar connecting the oscillation section to the main frame for defining an oscillation axis about which the oscillation section pivotally oscillates relative to the main frame; and a first spring and a second spring that cause the oscillation section to be supported by the frame; wherein the oscillation section is located between the first spring and the second spring, each of the first spring and the second spring being deformable in response to oscillation of the oscillation section about the oscillation axis; wherein the torsion bar is connected to a first portion of the oscillation section at which the oscillation axis passes, each of the first and second springs being connected to a second portion of the oscillation section that is located away from the oscillation axis; and wherein each of the first and second springs has width which is largest at a portion for connection to the frame and progressively decreases toward the oscillation section. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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Specification