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Method of arc detection

  • US 7,262,606 B2
  • Filed: 03/24/2006
  • Issued: 08/28/2007
  • Est. Priority Date: 03/26/2005
  • Status: Active Grant
First Claim
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1. A method for detecting arcs in a plasma process that is fed by an AC generator with an output signal of the AC generator for supplying power, the method comprising:

  • determining a reference value that is a measure of time based on a time response and a duration of half waves of the output signal or of an internal signal of the AC generator,comparing the reference value with a threshold value, anddetecting an arc if a predetermined result of the comparison is obtained.

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