Active damping apparatus, exposure apparatus and device manufacturing method

• US 7,264,235 B2
• Filed: 05/17/2005
• Issued: 09/04/2007
• Est. Priority Date: 04/19/2002
• Status: Expired due to Fees

• Current Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Original Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Inventors: Morisada, Masahiro
• Primary Examiner(s): Burch; Melody M.
• Application Number:
  US11/130,240
• Publication Number:
  US 20050217956A1
• Time in Patent Office: 840 Days
• Field of Search: 188/267, 188/378, 267/140.14, 267/140.15, 248/637, 248/638
• US Class Current: 267/140.14
• CPC Class Codes: G03F 7/70725 control
• CPC Class Codes: G03F 7/70766 Reaction force control means, e.g. countermass
• CPC Class Codes: G03F 7/70833 Mounting of optical systems, e.g. mounting of illumination system, projection system or stage systems on base-plate or ground
• CPC Class Codes: G03F 7/709 Vibration, e.g. vibration detection, compensation, suppression or isolation

Abstract

An active damping apparatus for damping vibration due to driving of a stage and/or counter-mass mounted on an isolation table in an exposure device for the manufacture of semiconductor devices has a setting unit for selecting the stage and/or the counter-mass to drive and setting a control mode according to what is to be driven. The apparatus further has a control input switch that sets up a control loop for inputting control target values for driving the stage and/or the counter-mass to an isolation table controller so as to offset the drive reaction torque generated by the movement of the stage and/or counter-mass.

Claims

1. A supporting apparatus comprising:

a first movable member;

a second movable member adapted to cancel a reaction force generated by movement of said first movable member;

a table adapted to mount said first movable member and said second movable member;

a supporting unit configured to support said table and to adjust a position and a tilt of said table;

a controller adapted to control said supporting unit;

a setting unit adapted to set a control mode based on conditions for driving said first movable member and said second movable member; and

a switch adapted to input target values for driving said first movable member and said second movable member into said controller,

wherein said switch is controlled based on the control mode set by said setting unit,

wherein said switch is controlled so that the target values of said first movable member and said second movable member are not inputted into said controller, in a case in which the control mode is set so that said first movable member and said second movable member are driven in tandem,

wherein said switch is controlled so that the target value of either said first movable member or said second movable member to be driven is inputted into said controller, in a case in which the control mode is set so that either said first movable member or said second movable member is driven independently, and

wherein said switch is controlled so that the target values of said first movable member and said second movable member are inputted into said controller, in a case in which the control mode is set so that said first movable member and said second movable member are driven independently.

2. The apparatus according to claim 1, further comprising:

a second controller adapted to control driving of said first movable member;

a third controller adapted to control driving of said second movable member; and

a second switch adapted to input a target value for driving said first movable member into said third controller,

wherein said second switch is controlled by being turned ON or OFF based on the control mode set by said setting unit.

3. The apparatus according to claim 2, wherein said second switch is controlled so that the target value of said first movable member is inputted into said third controller, in a case wherein the control mode is set so that said first movable member and said second movable member are driven in tandem,

wherein said second switch is controlled so that the target value of said first movable member is not inputted into said third controller, in a case wherein the control mode is set so that one of said first movable member and said second movable member is driven independently, and

wherein said second switch is controlled so that the target value of said first movable member is not inputted into said third controller, in a case wherein the control mode is set so that said first movable member and said second movable member are driven independently.

4. The apparatus according to claim 1, wherein said control mode is set based on any one of modes including:

a first mode for driving in tandem said first movable member and said second movable member;

a second mode for driving independently said first movable member;

a third mode for driving independently said second movable member; and

a fourth mode for driving independently said first movable member and said second movable member,

wherein said switch is controlled so that the target values of said first movable member and said second movable member to be inputted into said controller are OFF in the first mode,

wherein said switch is controlled so that the target value of said first movable member to be inputted into said controller is ON in the second mode,

wherein said switch is controlled so that the target value of said second movable member to be inputted into said controller is ON in the third mode, and

wherein said switch is controlled so that the target values of said second movable member to be inputted into said controller are ON in the fourth mode.

5. A supporting apparatus comprising:

a first movable member;

a second movable member adapted to cancel a reaction force generated by movement of said first movable member;

a driving unit adapted to drive said first movable member and said second movable member;

a supporting unit adapted to support said first movable member and said second movable member;

a control unit adapted to control a position and a tilt of said supporting unit; and

a switch adapted to input target values for driving said first movable member and said second movable member into said control unit,

wherein said switch is controlled so that the target values of said first movable member and said second movable member are not inputted into said control unit, in a case wherein said first movable member and said second movable member are driven in tandem,

wherein said switch is controlled so that the target value of one of said first movable member and said second movable member to be driven is inputted into said control unit, in a case wherein either said first movable member or said second movable member is driven independently, and

wherein said switch is controlled so that the target values of said first movable member and said second movable member are inputted into said control unit, in a case wherein said first movable member and said second movable member are driven independently.

6. The apparatus according to claim 5, further comprising:

a second control unit adapted to control driving of said first movable member;

a third control unit adapted to control driving of said second movable member; and

a second switch adapted to input a target value for driving said first movable member into said third control unit,

wherein said second switch is controlled so that the target value of said first movable member is inputted into said third control unit, in a case wherein said first movable member and said second movable member are driven in tandem,

wherein said second switch is controlled so that the target value of said first movable member is not inputted into said third control unit, in a case wherein either said first movable member or said second movable member is driven independently, and

wherein said second switch is controlled so that the target value of said first movable member is not inputted into said third control unit, in a case wherein said first movable member and said second movable member are driven independently.