Hard coating film excellent in adhesion and manufacturing method thereof
First Claim
1. A hard coating film excellent in adhesion to be formed on a substrate, comprising stacked layers including at least the following layers (1) to (3):
- (1) a first layer on the substrate side comprising one or more metals selected from the group consisting of elements in Groups 4A, 5A, and 6A of the periodic table;
(2) a B- and C-containing surface layer; and
(3) a graded composition layer that is formed in a sandwiched manner between the first layer and the surface layer, and has a thickness of 0.05 μ
m or more, and in which the content of B and C changes continuously or stepwise from the first layer side toward the surface layer side, wherein a bond between one or more elements selected from the group consisting of elements in Groups 4A, 5A, and 6A of the periodic table, and at least any of B, C, and N is contained in the graded composition layer.
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Accused Products
Abstract
A hard coating film of the present invention is formed on a substrate, and is a multilayer including at least the following layers (1) to (3). (1) A first layer on the substrate side comprising one or more metals selected from the group consisting of elements in Groups 4A, 5A, and 6A of the periodic table; (2) a B- and C-containing surface layer; and (3) a graded composition layer which is formed in a sandwiched manner between the first layer and the surface layer, and in which the content of B and C changes continuously or stepwise from the first layer side toward the surface layer side. Another hard coating film of the present invention has a cubic boron nitride film as its outermost surface layer; the cubic boron nitride film is stacked in a state of having been nucleated from a B- and N-containing layer; and the B- and N-containing layer has a ratio of N to B of 0.8 to 1 on a mole basis in at least the nucleation portion, and contains one or more elements selected from the group consisting of elements in Groups 4A, 5A, and 6A of the periodic table, and Si in a proportion of 0.02 to 0.1 on a mole basis. Such a configuration provides a hard coating film capable of being formed with good adhesion on the substrate surface of a cemented carbide, a high-speed steel, or the like.
15 Citations
15 Claims
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1. A hard coating film excellent in adhesion to be formed on a substrate, comprising stacked layers including at least the following layers (1) to (3):
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(1) a first layer on the substrate side comprising one or more metals selected from the group consisting of elements in Groups 4A, 5A, and 6A of the periodic table; (2) a B- and C-containing surface layer; and (3) a graded composition layer that is formed in a sandwiched manner between the first layer and the surface layer, and has a thickness of 0.05 μ
m or more, and in which the content of B and C changes continuously or stepwise from the first layer side toward the surface layer side, wherein a bond between one or more elements selected from the group consisting of elements in Groups 4A, 5A, and 6A of the periodic table, and at least any of B, C, and N is contained in the graded composition layer. - View Dependent Claims (2, 3, 4, 5)
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6. A hard coating film excellent in adhesion to be formed on a substrate, comprising stacked layers including at least the following layers (1) to (3):
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(1) a first layer on the substrate side comprising a layer of a nitride and/or a carbonitride of one or more metals selected from the group consisting of elements in Groups 4A, 5A, and 6A of the periodic table; (2) a B- and C-containing surface layer; and (3) a graded composition layer that is formed in a sandwiched manner between the first layer and the surface layer, and has a thickness of 0.05 μ
m or more, and in which the content of B and C changes continuously or stepwise from the first layer side toward the surface layer side, wherein a bond between one or more elements selected from the group consisting of elements in Groups 4A, 5A, and 6A of the periodic table, and at least any of B, C, and N is contained in the graded composition layer. - View Dependent Claims (7, 8, 9)
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10. A hard coating film excellent in adhesion, comprising:
- a cubic boron nitride film as an outermost surface layer; and
a B- and N-containing layer, the cubic boron nitride film being stacked in a state of having been nucleated from the B- and N-containing layer, and the B- and N-containing layer having a ratio of N to B of 0.8 to 1 on a mole basis at least in the nucleation portion, and containing one or more elements selected from the group consisting of elements in Groups 4A, 5A, and 6A, and Si in a proportion of 0.02 to 0.1 on a molar ratio basis, wherein the hard coating film contains C in a proportion of 0.2 or less on a mole basis in at least the nucleation portion. - View Dependent Claims (11, 12, 13, 14, 15)
- a cubic boron nitride film as an outermost surface layer; and
Specification