Lithographic apparatus, device manufacturing method, and slide assembly

• US 7,265,817 B2
• Filed: 08/26/2004
• Issued: 09/04/2007
• Est. Priority Date: 08/27/2003
• Status: Active Grant

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: ASML Netherlands BV (ASML Holding NV)
• Inventors: Hage, Edward
• Primary Examiner(s): FULLER, RODNEY EVAN
• Application Number:
  US10/926,396
• Publication Number:
  US 20050083508A1
• Time in Patent Office: 1,104 Days
• Field of Search: 355/53, 355/72, 355/73, 355/75, 355/76, 355/77
• US Class Current: 355/72
• CPC Class Codes: G03F 7/70816 Bearings

Abstract

A lithographic apparatus includes a slide assembly, having a base, which base has a running surface, a slide member adapted to move over the running surface, and a bearing system configured to create a distance between the slide member and the running surface. The bearing system includes a first force generating device configured to provide a first force in a first direction, the first direction being substantially perpendicular to the running surface, and a second force generating device configured to provide a second force in a second direction, the second force being opposite to the first direction. The first and second force generating devices are adapted to cooperate in establishing the distance between the slide member and the running surface. The second force generating device includes a plurality of force generating elements defining an area between them, in which area the first force generating device is arranged.

Claims

1. A slide assembly comprising:

a base including a running surface,

a slide member configured to move over the running surface, and

a bearing system configured to create a distance between the slide member and the running surface, the bearing system comprising;

(a) a magnetically active system configured to provide a magnetic attraction force in a first direction, said first direction being at least substantially perpendicular to the running surface, and

(b) an air bearing system configured to provide a repelling force in a second direction, said second direction being opposite to the first direction, the magnetically active system and the air bearing system being adapted to cooperate in establishing the distance between the slide member and the running surface,

wherein the air bearing system comprises a plurality of air bearing elements, said plurality of air bearing elements arranged to substantially enclose an area devoid of air bearing elements in which substantially the entire magnetically active system is arranged.

2. The slide assembly of claim 1, wherein the air bearing system encompasses the magnetically active system.

3. The slide assembly of claim 1, further comprising a suction system configured to create at least partial vacuum to create an attraction force.

4. The slide assembly of claim 1, wherein the

air bearing elements includes an array of holes to let out pressurized gas, said air bearing elements being configured to provide a repelling force between the slide member and the surface over which the slide member is configured to move, and

wherein the magnetically active system includes an array of magnetic bodies,

wherein the running surface comprises a metal counter plate configured to close the magnetic flux lines of the magnetic bodies, such that an attracting force between the slide member and the running surface is created.

5. The lithographic apparatus of claim 4, wherein the bearing system includes a metal back plate, adjoining the magnetic bodies at their side facing away from the surface, said metal back plate being configured to close the magnetic flux lines on said side, the magnetic bodies and the back plate being arranged in a casing of ceramic material.

6. The lithographic apparatus of claim 4, wherein the magnetic bodies are arranged in a metal casing, said metal casing being configured to close the magnetic flux lines on the side of the magnetic bodies facing away from the surface.

7. A lithographic apparatus comprising:

an illumination system configured to condition a beam of radiation;

a support structure configured to support a patterning device, the patterning device configured to impart the beam of radiation with a pattern in its cross section;

a substrate table configured to hold a substrate;

a projection system configured to project the patterned beam of radiation onto a target portion of the substrate; and

a slide assembly comprising;

(a) a base including a running surface,

(b) a slide member configured to move over the running surface, and

(c) a bearing system configured to create a distance between the slide member and the running surface, the bearing system comprising;

(i) a magnetically active system configured to provide a magnetic attraction force in a first direction, said first direction being at least substantially perpendicular to the running surface, and

(ii) an air bearing system configured to provide a repelling force in a second direction, said second direction being opposite to the first direction, the magnetically active system and the air bearing system being adapted to cooperate in establishing the distance between the slide member and the running surface,

wherein the air bearing system includes a plurality of air bearing elements, said plurality of air bearing elements arranged to substantially enclose an area devoid of air bearing elements in which substantially the entire magnetically active system is arranged.

8. The lithographic apparatus of claim 7, wherein the air bearing system encompasses the magnetically active system.

9. The lithographic apparatus of claim 7, further comprising a suction system configured to create at least partial vacuum to create an attraction force.

10. The lithographic apparatus of claim 7, wherein the

air bearing elements include an array of holes to let out pressurized gas, said air bearing elements being configured to provide a repelling force between the slide member and the surface over which the slide member is configured to move, and

wherein the magnetically active system includes an array of magnetic bodies,

wherein the running surface comprises a metal counter plate configured to close the magnetic flux lines of the magnetic bodies, such that an attracting force between the slide member and the running surface is created.

11. The lithographic apparatus of claim 10, wherein the bearing system includes a metal back plate, adjoining the magnetic bodies at their side facing away from the surface, said metal back plate being configured to close the magnetic flux lines on said side, the magnetic bodies and the back plate being arranged in a casing of ceramic material.

12. The lithographic apparatus of claim 10, wherein the magnetic bodies are arranged in a metal casing, said metal casing being configured to close the magnetic flux lines on the side of the magnetic bodies facing away from the surface.

13. A device manufacturing method comprising:

providing a beam of radiation;

patterning the beam of radiation with a pattern in its cross-section;

projecting the patterned beam of radiation onto a target portion of the layer of radiation-sensitive material;

creating a distance between a running surface of a base and a slide member which carries an object, to allow movement of the slide member over the running surface using a bearing system,

wherein the bearing system comprises a magnetically active system configured to provide a magnetic attraction force in a first direction, said first direction being substantially perpendicular to the running surface, and an air bearing system configured to provide a repelling force in a second direction, said second direction being opposite to the first direction, the magnetically active system and the air bearing system being adapted to cooperate in establishing the distance between the slide member and the running surface, and

wherein the air bearing system comprises a plurality of air bearing elements, said air bearing elements arranged to substantially enclose an area devoid of air bearing elements in which substantially the entire magnetically active system is arranged.

14. The method of claim 13,

wherein said first force and said second force act to space apart the slide member from the running surface and are directed such that a bending moment induced by each of said first and second force on said slide member is substantially zero.

15. The device manufacturing method of claim 14, wherein said slide member is configured to support at least a patterning device or a substrate.

16. The method of claim 13,

wherein a line of action of said first force substantially coincides with a line of action of said second force such that said first and second force act to space apart the slide member from the running surface.

17. A bearing system configured to support a slide member over a running surface of a base, comprising:

a magnetically active system configured to provide a magnetic attraction force in a first direction, said first direction being substantially perpendicular to said running surface; and

an air bearing system configured to provide a repelling force in a second direction, said second direction being opposite to the first direction,

wherein the air bearing system comprises a plurality of air bearing elements, said air bearing elements arranged to substantially enclose an area devoid of air bearing elements in which substantially the entire magnetically active system is arranged

such that an action line of the first force substantially coincides with an action line of the second force.

18. The bearing system of claim 17, wherein said plurality of air bearing elements are located at a substantially equal distance from an outside contour of said magnetically active system.

19. The bearing system of claim 17, wherein said magnetically active system includes an array of magnets configured to generate said first force.

20. The bearing system of claim 19, further comprising a metal plate arranged in the slide member and configured to close magnetic lines generated by said array of magnets.

21. The bearing system of claim 17, wherein said air bearing system and magnetically active system are housed in a ceramic casing.

22. The bearing system of claim 17, wherein a bending moment induced by each of said air bearing system and magnetically active system on said slide member is substantially zero.