Method for producing laser with resonant reflector
First Claim
1. A method for forming a resonant reflector on a top layer of an optoelectronic device, the method comprising:
- depositing a first material layer on the top layer of the optoelectronic device, the first material layer having a first refractive index and a thickness of about an odd multiple of a quarter of a wavelength to which the optoelectronic device is tuned, wherein the first material layer comprises a top mirror layer of a DBR mirror;
creating at least one patterned region that extends at least partially into the first material layer, the thickness of the first material layer being reduced in the at least one patterned region;
filling, partially at least, at least one selected patterned region with a second material having a second refractive index, one of the first and second refractive indices being greater than the other of the first and second refractive indices; and
depositing a third layer immediately adjacent the first material layer, the third layer having a refractive index greater than the refractive index of the first material layer.
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Abstract
In one exemplary embodiment of the invention, a method is employed that is directed to forming a resonant reflector on an optoelectronic device, such as a semiconductor laser for example. The exemplary method involves depositing a first material layer on the top layer of the optoelectronic device, where the first material layer having a refractive index and a thickness of about an odd multiple of a quarter of a wavelength to which the optoelectronic device is tuned. A patterned region is then created that extends at least partially into the first material layer. Selected patterned regions are at least partially filled with a second material that has a refractive index that is greater than the refractive index of the first material layer. Finally, a third layer, having a refractive index greater than the refractive index of the first material layer, is deposited immediately adjacent the first material layer.
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Citations
17 Claims
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1. A method for forming a resonant reflector on a top layer of an optoelectronic device, the method comprising:
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depositing a first material layer on the top layer of the optoelectronic device, the first material layer having a first refractive index and a thickness of about an odd multiple of a quarter of a wavelength to which the optoelectronic device is tuned, wherein the first material layer comprises a top mirror layer of a DBR mirror; creating at least one patterned region that extends at least partially into the first material layer, the thickness of the first material layer being reduced in the at least one patterned region; filling, partially at least, at least one selected patterned region with a second material having a second refractive index, one of the first and second refractive indices being greater than the other of the first and second refractive indices; and depositing a third layer immediately adjacent the first material layer, the third layer having a refractive index greater than the refractive index of the first material layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A method for forming a resonant reflector on a top layer of an optoelectronic device, the method comprising:
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depositing a first material layer on the top layer of the optoelectronic device, the first material layer having a first refractive index and a thickness of about an odd multiple of a quarter of a wavelength to which the optoelectronic device is tuned; creating at least one patterned region that extends at least partially into the first material layer, the thickness of the first material layer being reduced in the at least one patterned region; filling, partially at least, at least one selected patterned region with a second material having a second refractive index, one of the first and second refractive indices being greater than the other of the first and second refractive indices; and depositing a third layer immediately adjacent the first material layer, the third layer having a refractive index greater than the refractive index of the first material layer, wherein the first and second material layers have a refractive index that is less than a refractive index of a top mirror layer of the optoelectronic device. - View Dependent Claims (14)
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15. A method for forming a resonant reflector on a top layer of an optoelectronic device, the method comprising:
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depositing a first material layer on the top layer of the optoelectronic device, the first material layer having a first refractive index and a thickness of about an odd multiple of a quarter of a wavelength to which the optoelectronic device is tuned; creating at least one patterned region that extends at least partially into the first material layer, the thickness of the first material layer being reduced in the at least one patterned region; filling, partially at least, at least one selected patterned region with a second material having a second refractive index, one of the first and second refractive indices being greater than the other of the first and second refractive indices; and depositing a third layer immediately adjacent the first material layer, the third layer having a refractive index greater than the refractive index of the first material layer, wherein the first material layer is a top mirror layer of the optoelectronic device. - View Dependent Claims (16, 17)
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Specification