Method and apparatus for micromachines, microstructures, nanomachines and nanostructures

• US 7,266,998 B2
• Filed: 11/03/2004
• Issued: 09/11/2007
• Est. Priority Date: 11/28/2001
• Status: Expired due to Fees

• Current Assignee: Terraspan LLC
• Original Assignee: General Nanotechnology LLC
• Inventors: Kley, Victor B.
• Primary Examiner(s): Williams; Hezron
• Assistant Examiner(s): FRANK, RODNEY T
• Application Number:
  US10/981,142
• Publication Number:
  US 20050172739A1
• Time in Patent Office: 1,042 Days
• Field of Search: 731/05, 738/62, 738/626.34, 738/626.39, 735/041.5
• US Class Current: 73/105
• CPC Class Codes: F04C 2/18 with similar tooth forms F04C2/16 takes precedence
• CPC Class Codes: F05C 2203/06 Silicon
• CPC Class Codes: F05C 2203/0882 Carbon, e.g. graphite
• CPC Class Codes: G01Q 70/10 Shape or taper
• CPC Class Codes: Y10S 977/873 Tip holder
• CPC Class Codes: Y10T 74/20582 Levers

Abstract

Parts and structures are described for micro and nano machines and the creation of macro structures with nano and micro layers of special materials to provide improved performance.

Claims

1. A cantilever assembly suitable for use in a scanning probe microscope (SPM) comprising a holder and a single lever extending from a single location on the holder, the single lever having a first major surface and a second major surface spaced apart from the first major surface and in parallel relation to the first major surface, the single lever further having an end portion distal the holder, the single lever further including a plurality of openings formed through the first major surface and the second major surface, each opening spaced apart from the holder.

2. The cantilever assembly of claim 1 wherein the SPM is an atomic force microscope, or a lateral force microscope, or a magnetic force microscope.

3. The cantilever assembly of claim 1 wherein a spring constant associated with the cantilever structure is determined based on the one or more openings.

4. A cantilever assembly suitable for use in a scanning probe microscope (SPM) comprising a holder and a single lever, the single lever having a single connection to the holder, the single lever extending from the holder, the single lever having a first major surface, the single lever further having an end portion distal the holder, wherein the single lever is ventilated using a plurality of openings, each opening spaced apart from the holder.

5. The cantilever assembly of claim 4 as used in atomic force microscopy, lateral force microscopy, or magnetic force microscopy.

6. A cantilever assembly suitable for scanning probe microscopy, the cantilever assembly comprising a main body portion and a single flexible member extending from the main body portion, the single flexible member having a single connection to the main body portion and having a free end distal the main body portion, the single flexible member having a perforated structure comprising perforations formed through the perforated structure that are spaced apart from the main body portion.

7. The cantilever assembly of claim 6 wherein the flexible member comprises a first major surface and a second major surface spaced from the first major surface and parallel to the first major surface, the perforated structure comprising one or more openings formed through the first major surface and through the second major surface of the flexible member.

8. The cantilever assembly of claim 6 as used in atomic force microscopy, lateral force microscopy, or magnetic force microscopy.