Inertial micromechanical tuning-fork gyrometer
First Claim
1. A micromachined, gyrometer, comprising:
- a planar moving structure anchored on a fixed substrate by anchoring feet, the moving structure having at least two moving assemblies that are symmetrical with respect to an axis of symmetry A1 contained in the plane of the moving structure and are coupled by a coupling structure that connects these two assemblies in order to allow transfer of mechanical vibration energy between the moving assemblies, the anchoring feet being located outside the axis of symmetry A1, wherein the fixed substrate has etched portions and said etched portions partially isolate at least one region of the fixed substrate from the rest of the fixed substrate, the partially isolated region having at least one of said anchoring feet, and the fixed substrate being mounted on a support substrate by fasteners, and said fasteners are located outside said partially isolated region of the fixed substrate so that each of said fasteners are is partially isolated from said at least one of said anchoring feet.
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Abstract
The invention relates to a micromachined gyrometer having a planar moving structure anchored on a fixed substrate by anchoring feet, the fixed substrate being mounted on a support substrate via fasteners, the moving structure comprising at least two moving assemblies that are symmetrical with respect to an axis of symmetry A1; the anchoring feet are located outside this axis A1. The fixed substrate has etched features for the purpose of partly isolating at least one region from the rest of the fixed substrate, this region having a portion of the fixed substrate that includes at least one anchoring foot, and the fixed substrate is mounted on the support substrate via fasteners applied outside the region.
25 Citations
11 Claims
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1. A micromachined, gyrometer, comprising:
a planar moving structure anchored on a fixed substrate by anchoring feet, the moving structure having at least two moving assemblies that are symmetrical with respect to an axis of symmetry A1 contained in the plane of the moving structure and are coupled by a coupling structure that connects these two assemblies in order to allow transfer of mechanical vibration energy between the moving assemblies, the anchoring feet being located outside the axis of symmetry A1, wherein the fixed substrate has etched portions and said etched portions partially isolate at least one region of the fixed substrate from the rest of the fixed substrate, the partially isolated region having at least one of said anchoring feet, and the fixed substrate being mounted on a support substrate by fasteners, and said fasteners are located outside said partially isolated region of the fixed substrate so that each of said fasteners are is partially isolated from said at least one of said anchoring feet. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
Specification