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SOI-MEMS gyroscope having three-fold symmetry

  • US 7,267,005 B1
  • Filed: 03/02/2005
  • Issued: 09/11/2007
  • Est. Priority Date: 03/02/2005
  • Status: Expired due to Fees
First Claim
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1. A SOI-MEMS gyroscope, comprising:

  • a silicon substrate;

    a proof mass;

    suspension means for suspending said proof mass above said silicon substrate;

    actuating means connected to said suspension means;

    sensing means connected to said suspension means; and

    wherein said suspension means comprises a plurality of lateral flexures and a plurality of central flexures, said central flexures being aligned with a center point of said proof mass such that said center point lies between a first pair of central flexures which are oriented to the Y axis and said center point lies between a second pair of central flexures which are oriented to the X axis.

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