SOI-MEMS gyroscope having three-fold symmetry
First Claim
1. A SOI-MEMS gyroscope, comprising:
- a silicon substrate;
a proof mass;
suspension means for suspending said proof mass above said silicon substrate;
actuating means connected to said suspension means;
sensing means connected to said suspension means; and
wherein said suspension means comprises a plurality of lateral flexures and a plurality of central flexures, said central flexures being aligned with a center point of said proof mass such that said center point lies between a first pair of central flexures which are oriented to the Y axis and said center point lies between a second pair of central flexures which are oriented to the X axis.
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Abstract
A SOI-MEMS gyroscope has a three fold symmetrical construction such that is symmetrical in the x direction, the y direction and diagonally. The gyroscope is suspended above a silicon substrate by lateral flexures that are located at the corners of the proof mass and by central flexures that are positioned at the center regions of the proof mass. The proof mass, lateral flexures, and central flexures are formed of a silicon composition with the flexures supporting the proof mass such that the proof mass will not touch the underlying base silicon substrate even when subjected to extreme G forces. Comb finger actuators apply an electrostatic force to the proof mass in the x direction; and, when experiencing an external rotational rate around the z-axis, the Coriolis force acts along the y direction and the resulting deflection is sensed by a pair of comb-finger capacitors connected as a differential capacitive voltage divider.
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Citations
28 Claims
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1. A SOI-MEMS gyroscope, comprising:
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a silicon substrate; a proof mass; suspension means for suspending said proof mass above said silicon substrate; actuating means connected to said suspension means; sensing means connected to said suspension means; and wherein said suspension means comprises a plurality of lateral flexures and a plurality of central flexures, said central flexures being aligned with a center point of said proof mass such that said center point lies between a first pair of central flexures which are oriented to the Y axis and said center point lies between a second pair of central flexures which are oriented to the X axis. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A SOI-MEMS gyroscope, comprising:
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a proof mass; a flexure support; an actuator element connecting to said flexure support; a strip connector; a central flexure that includes said strip connector and a plurality of strips that are directly connected to said strip connector, at least one of said plurality of strips being directly connected to said flexure support and at least one strip of said plurality of strips being connected to the proof mass at a lateral isthmus location; a lateral flexure having a plurality of lateral strips with one strip of said plurality of strips being directly connected to a lateral region of said flexure support by an isthmus and another strip of said plurality of lateral strips connecting to an arm of said flexure support by another isthmus. - View Dependent Claims (16, 17, 18)
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19. A gyroscope device, comprising:
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a substrate surface (70); a proof mass (52); a plurality of central flexures (60) connecting to said proof mass, at least a portion of each central flexure of said plurality of central flexures being positioned between respective first and second promontory regions (112A, 112B) of said proof mass in one direction, and being positioned between an interior border (91) of said proof mass and a flexure support rotor (78) in another direction;
each of said plurality of central flexures having a truss (100) that is separated from said interior border by a predetermined distance, said each central flexure further including a plurality of flexure strips which are directly connected to said truss, a first flexure strip (104) of said plurality of flexure strips connects said truss (100) to said first promontory region (112A) of said proof mass and a second flexure strip (108) connects said truss to said second promontory region (112B) of said proof mass, and a third flexure strip (102) directly connects said truss (100) and said flexure support rotor (78). - View Dependent Claims (20, 21, 22, 23, 24, 25, 26, 27, 28)
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Specification