Substrate for liquid crystal display and liquid crystal display utilizing the same

• US 7,268,842 B2
• Filed: 01/05/2006
• Issued: 09/11/2007
• Est. Priority Date: 03/28/2003
• Status: Active Grant

• Current Assignee: Unified Innovative Technology, LLC
• Original Assignee: Sharp Kabushiki Kaisha (Hon Hai Precision Industry Co., Ltd.)
• Inventors: Misaki, Katsunori, Tanose, Tomonori, Sawasaki, Manabu
• Primary Examiner(s): Ton; Toan
• Application Number:
  US11/326,276
• Publication Number:
  US 20060114393A1
• Time in Patent Office: 614 Days
• Field of Search: 349/43, 349/42, 349/106, 257/59, 257/72
• US Class Current: 349/106
• CPC Class Codes: G02F 1/136222 Colour filters incorporated in the active matrix substrate
• CPC Class Codes: G02F 1/136227 Through-hole connection of the pixel electrode to the active element through an insulation layer

Abstract

The generation of residues or flakes of a color filter is suppressed to eliminate conduction failures on an LCD substrate having a color filter on an array substrate. A passivation film formed between a pixel electrode formed in each of a plurality of pixel regions and a TFT for driving the pixel electrode has a multi-layer structure constituted by SiN layers and a SiO layers, and the SiO layer is located at the top of the film. A resin CF layer is formed on the passivation film having such a multi-layer structure. Since the resin CF layer is formed directly on the SiO layer, reduction of the adhesion of the same is suppressed. As a result, the color filter is unlikely to come off when the resin CF layer is formed, and residues of the color filter is unlikely to be generated when a contact hole is formed in the resin CF layer. This suppresses conduction failures and makes it possible to provide a reliable TFT substrate and LCD having high display characteristics.

Claims

1. A substrate for a liquid crystal display comprising:

a passivation film formed between a pixel electrode formed in each of a plurality of pixel regions and a switching element for driving the pixel electrode; and

a color filter layer formed on the passivation film;

wherein the passivation film has a multi-layer structure constituted by a silicon nitride layer and a silicon oxide layer or a silicon oxynitride layer and wherein the silicon oxide layer or the silicon oxynitride layer is formed in contact with the color filter layer.

2. A substrate for a liquid crystal display according to claim 1, wherein the silicon oxide layer or the silicon oxynitride layer has a thickness of 3 nm or more and 20 nm or less.

3. A substrate for a liquid crystal display according to claim 1, wherein the silicon nitride layer has a structure in which layers of two or more silicon nitrides having different compositions of silicon atoms and nitrogen atoms are stacked on one another.

4. A substrate for a liquid crystal display according to claim 1, wherein the silicon nitride layer is formed such that a region of the layer has a higher density of silicon atoms, the closer the region to the silicon oxide layer or the silicon oxynitride layer in contact with the color filter layer or such that a region of the layer has a higher density of hydrogen atoms bonded with silicon atoms, the closer the region to the silicon oxide layer or the silicon oxynitride layer in contact with the color filter.

5. A liquid crystal display comprising:

a base substrate having a passivation film formed between a pixel electrode formed in each of a plurality of pixel regions and a switching element for driving the pixel electrode and a color filter layer formed on the passivation film;

an opposite substrate provided opposite to the base substrate for a liquid crystal display; and

a liquid crystal layer sandwiched between the base substrate and the opposite substrate;

wherein the passivation film of the base substrate has a multi-layer structure constituted by a silicon nitride layer and a silicon oxide layer or a silicon oxynitride layer and wherein the silicon oxide layer or the silicon oxynitride layer is formed in contact with the color filter layer.