Micromirrors with lower driving voltages
First Claim
1. A micromirror device comprising:
- a reflecting element supported on a hinge for oscillating and positioning at least three states;
two separate independently controllable electrodes disposed on two opposite sides of said hinge wherein each of said electrodes is connected to a control circuit for independently applying a control voltage thereon to control said reflecting element to oscillate to different positions;
each of said electrodes is connected to a transistor having a gate connected to a common wordline and each transistor having a source connected to an independently controllable bitline for independently controlling said reflecting element to oscillate to different positions; and
each bitline connected to said source of said transistor is provided for receiving a binary bit represented by zero and one for applying a voltage to said electrodes for applying one of three digital signals represented by (1,0), (0,1) and (0,0) for controlling said reflecting element to oscillate to angular positions oriented substantially at a positive angle, a negative angle and 0°
relative to a perpendicular axis to said reflecting element.
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Accused Products
Abstract
A micromirror device with a lower driving voltage is disclosed. The lower driving voltage is achieved by projecting a partial light for image display during a micromirror is oscillating from fully on state to a fully off state. The micromirror device includes a reflective element supported on a hinge for oscillating and positioning at least three states. These three states are a fully on state, a fully off state, and a partially ON angular positions in responding to a digital control signal. The oscillation of the micromirrors is controlled by a two bits signal inputted to two electrodes for controlling the voltage of these electrodes respectively. The micromirrors are further controlled to change the oscillation direction at an angular position between the fully on and fully off positions at a fraction of an oscillation cycle. With these inventive features, the micromirrors are controllable to provide higher ranges of gray scales without increasing the driving voltage.
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Citations
15 Claims
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1. A micromirror device comprising:
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a reflecting element supported on a hinge for oscillating and positioning at least three states; two separate independently controllable electrodes disposed on two opposite sides of said hinge wherein each of said electrodes is connected to a control circuit for independently applying a control voltage thereon to control said reflecting element to oscillate to different positions; each of said electrodes is connected to a transistor having a gate connected to a common wordline and each transistor having a source connected to an independently controllable bitline for independently controlling said reflecting element to oscillate to different positions; and each bitline connected to said source of said transistor is provided for receiving a binary bit represented by zero and one for applying a voltage to said electrodes for applying one of three digital signals represented by (1,0), (0,1) and (0,0) for controlling said reflecting element to oscillate to angular positions oriented substantially at a positive angle, a negative angle and 0°
relative to a perpendicular axis to said reflecting element. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A micromirror device comprising:
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a reflecting element supported on a hinge for oscillating between two states wherein said reflecting elements is further controlled to stop or oscillate in a reverse direction before reaching either of said two states; two separate independently controllable electrodes disposed on two opposite sides of said hinge wherein each of said electrodes is connected to a control circuit for independently applying a control voltage thereon to control said reflecting element to oscillate to different positions; each of said electrodes is connected to a transistor having a gate connected to a common wordline and each transistor having a source connected to an independently controllable bitline for independently controlling said reflecting element to oscillate to different positions; and each bitline connected to said source of said transistor is provided for receiving a binary bit represented by zero and one for applying a voltage to said electrodes for applying one of three digital signals represented by (1,0), (0,1) and (0,0) for controlling said reflecting element to oscillate to angular positions oriented substantially at a positive angle, a negative angle and 0°
relative to a perpendicular axis to said reflecting element. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15)
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Specification