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Micromirrors with lower driving voltages

  • US 7,268,932 B2
  • Filed: 05/04/2005
  • Issued: 09/11/2007
  • Est. Priority Date: 11/01/2003
  • Status: Expired due to Fees
First Claim
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1. A micromirror device comprising:

  • a reflecting element supported on a hinge for oscillating and positioning at least three states;

    two separate independently controllable electrodes disposed on two opposite sides of said hinge wherein each of said electrodes is connected to a control circuit for independently applying a control voltage thereon to control said reflecting element to oscillate to different positions;

    each of said electrodes is connected to a transistor having a gate connected to a common wordline and each transistor having a source connected to an independently controllable bitline for independently controlling said reflecting element to oscillate to different positions; and

    each bitline connected to said source of said transistor is provided for receiving a binary bit represented by zero and one for applying a voltage to said electrodes for applying one of three digital signals represented by (1,0), (0,1) and (0,0) for controlling said reflecting element to oscillate to angular positions oriented substantially at a positive angle, a negative angle and 0°

    relative to a perpendicular axis to said reflecting element.

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