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Method of manufacturing a piezoelectric vibrator

  • US 7,269,885 B2
  • Filed: 03/30/2005
  • Issued: 09/18/2007
  • Est. Priority Date: 10/31/2001
  • Status: Expired due to Fees
First Claim
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1. A manufacturing method of a piezoelectric vibrator, comprising the steps of:

  • forming simultaneously, an electrode for oscillation and a metal film for gettering gas on a piezoelectric vibrator piece;

    holding the piezoelectric vibrator piece in a hermetic container and hermetically sealing the hermetic container; and

    heating the metal film by a laser beam from outside to perform gettering of gas contained in the sealed hermetic container.

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