Method of manufacturing a piezoelectric vibrator

• US 7,269,885 B2
• Filed: 03/30/2005
• Issued: 09/18/2007
• Est. Priority Date: 10/31/2001
• Status: Expired due to Fees

• Current Assignee: SII Crystal Technology Inc. (Seiko Group)
• Original Assignee: Seiko Instruments Incorporated (Seiko Group)
• Inventors: Shimizu, Satoshi, Matsuyama, Masaru
• Primary Examiner(s): TUGBANG, ANTHONY D
• Application Number:
  US11/093,617
• Publication Number:
  US 20050166676A1
• Time in Patent Office: 902 Days
• Field of Search: 29/253.5, 295/94, 310/312, 310/330, 310/332, 310/344, 438/58, 438/471, 438/477, 219/121.6, 219/121.65, 219/121.85
• US Class Current: 29/25.35
• CPC Class Codes: H03H 9/1021 the BAW device being of the cantilever type
• CPC Class Codes: H03H 9/1035 the enclosure being defined by two sealing substrates sandwiching the piezoelectric layer of the BAW device
• CPC Class Codes: Y10T 29/42 Piezoelectric device making
• CPC Class Codes: Y10T 29/49005 Acoustic transducer

Abstract

A method of manufacturing a piezoelectric vibrator comprises providing a piezoelectric vibrator piece inside a hermetic container. A gettering metal film is formed inside the hermetic container on an inner surface of the container or on a surface of the piezoelectric vibrator piece, and a weight is formed separate from the metal film on the piezoelectric vibrator piece. A laser beam is irradiated on the metal film to heat the same to getter gas contained inside the hermetic container, and after completion of gettering, the laser beam is irradiated on the weight to adjust the frequency of vibration of the piezoelectric vibrator piece.

Claims

1. A manufacturing method of a piezoelectric vibrator, comprising the steps of:

forming simultaneously, an electrode for oscillation and a metal film for gettering gas on a piezoelectric vibrator piece;

holding the piezoelectric vibrator piece in a hermetic container and hermetically sealing the hermetic container; and

heating the metal film by a laser beam from outside to perform gettering of gas contained in the sealed hermetic container.